Wavefront Metrology for High Resolution Optical Systems

Wavefront Metrology for High Resolution Optical Systems
Author: Ryan Miyakawa
Publisher:
Total Pages: 252
Release: 2011
Genre:
ISBN:

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Next generation extreme ultraviolet (EUV) optical systems are moving to higher resolution optics to accommodate smaller length scales targeted by the semiconductor industry. As the numerical apertures (NA) of the optics become larger, it becomes increasingly difficult to characterize aberrations due to experimental challenges associated with high-resolution spatial filters and geometrical effects caused by large incident angles of the test wavefront. This dissertation focuses on two methods of wavefront metrology for high resolution optical systems. The first method, lateral shearing interferometry (LSI), is a self-referencing interferometry where the test wavefront is incident on a low spatial frequency grating, and the resulting interference between the diffracted orders is used to reconstruct the wavefront aberrations. LSI has many advantages over other interferometric tests such as phase-shifting point diffraction interferometry (PS/PDI) due to its experimental simplicity, stability, relaxed coherence requirements, and its ability to scale to high numerical apertures. While LSI has historically been a qualitative test, this dissertation presents a novel quantitative investigation of the LSI interferogram. The analysis reveals the existence of systematic aberrations due to the nonlinear angular response from the diffraction grating that compromises the accuracy of LSI at medium to high NAs. In the medium NA regime (0.15

Fringe 2009

Fringe 2009
Author: Wolfgang Osten
Publisher: Springer Science & Business Media
Total Pages: 808
Release: 2010-04-28
Genre: Technology & Engineering
ISBN: 3642030513

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21 years ago it was a joint idea with Hans Rottenkolber to organize a workshop dedicated to the discussion of the latest results in the automatic processing of fringe patterns. This idea was promoted by the insight that automatic and high precision phase measurement techniques will play a key role in all future industrial and scientific applications of optical metrology. A couple of months later more than 50 specialists from East and West met in East Berlin, the capital of the former GDR, to spend 3 days with the discussion of new principles of fringe processing. In the stimulating atmoshere the idea was born to repeat the workshop and to organize the meeting in an olympic schedule. And thus meanwhile 20 years have been passed and we have today Fringe number six. However, such a workshop takes place in a dynamic environment. Therefore the main topics of the previous events were always adapted to the most interesting subjects of the new period. In 1993 the workshop took place in Bremen and was dedicated to new principles of optical shape measurement, setup calibration, phase unwrapping and nondestructive testing, while in 1997 new approaches in multi-sensor metrology, active measurement strategies and hybrid processing technologies played a central role. 2001, the first meeting in the 21st century, was focused to optical methods for micromeasurements, hybrid measurement technologies and new sensor solutions for industrial inspection.

Fringe 2013

Fringe 2013
Author: Wolfgang Osten
Publisher: Springer Science & Business Media
Total Pages: 975
Release: 2013-08-15
Genre: Technology & Engineering
ISBN: 3642363598

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In continuation of the FRINGE Workshop Series this Proceeding contains all contributions presented at the 7. International Workshop on Advanced Optical Imaging and Metrology. The FRINGE Workshop Series is dedicated to the presentation, discussion and dissemination of recent results in Optical Imaging and Metrology. Topics of particular interest for the 7. Workshop are: - New methods and tools for the generation, acquisition, processing, and evaluation of data in Optical Imaging and Metrology (digital wavefront engineering, computational imaging, model-based reconstruction, compressed sensing, inverse problems solution) - Application-driven technologies in Optical Imaging and Metrology (high-resolution, adaptive, active, robust, reliable, flexible, in-line, real-time) - High-dynamic range solutions in Optical Imaging and Metrology (from macro to nano) - Hybrid technologies in Optical Imaging and Metrology (hybrid optics, sensor and data fusion, model-based solutions, multimodality) - New optical sensors, imaging and measurement systems (integrated, miniaturized, in-line, real-time, traceable, remote) Special emphasis is put on new strategies, taking into account the active combination of physical modeling, computer aided simulation and experimental data acquisition. In particular attention is directed towards new approaches for the extension of existing resolution limits that open the gates to wide-scale metrology, ranging from macro to nano, by considering dynamic changes and using advanced optical imaging and sensor systems.

Optical Metrology

Optical Metrology
Author: Kjell J. Gåsvik
Publisher: John Wiley & Sons
Total Pages: 372
Release: 2003-04-11
Genre: Technology & Engineering
ISBN: 0470846704

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New material on computerized optical processes, computerized ray tracing, and the fast Fourier transform, Bibre-Bragg sensors, and temporal phase unwrapping. * New introductory sections to all chapters. * Detailed discussion on lasers and laser principles, including an introduction to radiometry and photometry. * Thorough coverage of the CCD camera.

High Resolution Optical Surface Metrology with the Slope Measuring Portable Optical Test System

High Resolution Optical Surface Metrology with the Slope Measuring Portable Optical Test System
Author: Alejandro V. Maldonado
Publisher:
Total Pages: 165
Release: 2014
Genre:
ISBN:

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New optical designs strive to achieve extreme performance, and continually increase the complexity of prescribed optical shapes, which often require wide dynamic range and high resolution. SCOTS, or the Software Configurable Optical Test System, can measure a wide range of optical surfaces with high sensitivity using surface slope. This dissertation introduces a high resolution version of SCOTS called SPOTS, or the Slope measuring Portable Optical Test System. SPOTS improves the metrology of surface features on the order of sub-millimeter to decimeter spatial scales and nanometer to micrometer level height scales. Currently there is no optical surface metrology instrument with the same utility. SCOTS uses a computer controlled display (such as an LCD monitor) and camera to measure surface slopes over the entire surface of a mirror. SPOTS differs in that an additional lens is placed near the surface under test. A small prototype system is discussed in general, providing the support for the design of future SPOTS devices. Then the SCOTS instrument transfer function is addressed, which defines the way the system filters surface heights. Lastly, the calibration and performance of larger SPOTS device is analyzed with example measurements of the 8.4-m diameter aspheric Large Synoptic Survey Telescope's (LSST) primary mirror. In general optical systems have a transfer function, which filters data. In the case of optical imaging systems the instrument transfer function (ITF) follows the modulation transfer function (MTF), which causes a reduction of contrast as a function of increasing spatial frequency due to diffraction. In SCOTS, ITF is shown to decrease the measured height of surface features as their spatial frequency increases, and thus the SCOTS and SPOTS ITF is proportional to their camera system's MTF. Theory and simulations are supported by a SCOTS measurement of a test piece with a set of lithographically written sinusoidal surface topographies. In addition, an example of a simple inverse filtering technique is provided. The success of a small SPOTS proof of concept instrument paved the way for a new larger prototype system, which is intended to measure subaperture regions on large optical mirrors. On large optics, the prototype SPOTS is light weight and it rests on the surface being tested. One advantage of this SPOTS is stability over time in maintaining its calibration. Thus the optician can simply place SPOTS on the mirror, perform a simple alignment, collect measurement data, then pick the system up and repeat at a new location. The entire process takes approximately 5 to 10 minutes, of which 3 minutes is spent collecting data. SPOTS' simplicity of design, light weight, robustness, wide dynamic range, and high sensitivity make it a useful tool for optical shop use during the fabrication and testing process of large and small optics.

Metrics for High-quality Specular Surfaces

Metrics for High-quality Specular Surfaces
Author: Lionel R. Baker
Publisher: SPIE Press
Total Pages: 170
Release: 2004
Genre: Technology & Engineering
ISBN: 9780819455765

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This book supplies the optical component and systems designer, and quality assurance engineers and managers with the definitions, measurement principles, and standard metrics used to characterize high-quality specular surfaces. The author covers both the traditional visual methods as well as newer (but not necessarily better) computer-aided techniques and describes the metrics adopted by the new ISO standards, including the setting of form and finish tolerances. Key issues of industry are raised, to help stimulate research and development of new methods and standards that blend the best of the old and new approaches to surface assessment.

Optical Metrology

Optical Metrology
Author: Olivério D.D. Soares
Publisher: Springer Science & Business Media
Total Pages: 794
Release: 2012-12-06
Genre: Science
ISBN: 9400936095

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Optical Metrology is a rapidly expanding field i'n both its scientific foundations and technological developments, being of major concern to measurements, quality control, non-destructive tes ting and in fundamental research. In order to define the state-of-the-art, and to evaluate pre sent accomplishments, whilst giving an appraisal of how each of the particular topics will evolve the Optical Metrology-anAdvancedStudy Institute was organized with a concourse of the world's acknowledged experts. Thus, the Institute provided a forum for tutorial reviews blended with topics of current research in the form of a progressive and comprehensive presentation of recent promising developments, lea ding techniques and instrumentation in incoherent and coherent optics for Metrology, Sensing and Control in Science, Industry and Biomedici ne. Optical Metrology is a very broad field which is highly inter disciplinary in its applications, and in its scientific and technolo gical background. It is related to such diverse disciplines as physi cal and chemical sciences, engineering, electronics, computer scien ces, biological sciences and theoretical sciences, such as statistics. Although there was an emphasis on photomechanics and industri al applications, a marked diversity was reflected in the different background and interests of the participants. The vitality and viabi lity of the discipline was enhanced not only by the encouraging number of young scientists and industrialists participating and authoring, but also by the remarkably promising prospects found in x the practical applications supported by advanced electronic hybridi zation.

Optical Metrology for Precision Engineering

Optical Metrology for Precision Engineering
Author: Wei Gao
Publisher: Walter de Gruyter GmbH & Co KG
Total Pages: 655
Release: 2021-11-22
Genre: Technology & Engineering
ISBN: 3110542366

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This book provides readers the fundamentals of optical metrology for precision engineering. The next-generation measurement technologies based on ultrashort pulse laser and optical frequency comb are also presented, making it an essential reference book for various engineering fields. • Introduces fundamental theories and techniques • Combines theories with practical applications • Presents technologies in an easy-to-understand way

Handbook of Optical Dimensional Metrology

Handbook of Optical Dimensional Metrology
Author: Kevin Harding
Publisher: CRC Press
Total Pages: 509
Release: 2013-02-26
Genre: Technology & Engineering
ISBN: 1439854815

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Due to their speed, data density, and versatility, optical metrology tools play important roles in today’s high-speed industrial manufacturing applications. Handbook of Optical Dimensional Metrology provides useful background information and practical examples to help readers understand and effectively use state-of-the-art optical metrology methods. The book first builds a foundation for evaluating optical measurement methods. It explores the many terms of optical metrology and compares it to other forms of metrology, such as mechanical gaging, highlighting the limitations and errors associated with each mode of measurement at a general level. This comparison is particularly helpful to current industry users who operate the most widely applied mechanical tools. The book then focuses on each application area of measurement, working down from large area to medium-sized to submicron measurements. It describes the measurement of large objects on the scale of buildings, the measurement of durable manufactured goods such as aircraft engines and appliances, and the measurement of fine features on the micron and nanometer scales. In each area, the book covers fast, coarse measures as well as the finest measurements possible. Best practices and practical examples for each technology aid readers in effectively using the methods. Requiring no prior expertise in optical dimensional metrology, this handbook helps engineers and quality specialists understand the capabilities and limitations of optical metrology methods. It also shows them how to successfully apply optical metrology to a vast array of current engineering and scientific problems.