Transducers '97
Author | : Transducers (9, 1997, Chicago, Ill.) |
Publisher | : |
Total Pages | : 367 |
Release | : 1998 |
Genre | : Actuators |
ISBN | : |
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Author | : Transducers (9, 1997, Chicago, Ill.) |
Publisher | : |
Total Pages | : 367 |
Release | : 1998 |
Genre | : Actuators |
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Total Pages | : |
Release | : 2002 |
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Release | : 1997 |
Genre | : Actuators |
ISBN | : 9780780338296 |
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Total Pages | : |
Release | : 1997 |
Genre | : Actuators |
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Total Pages | : 170 |
Release | : 1998 |
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Total Pages | : 274 |
Release | : 2000 |
Genre | : Microelectronics |
ISBN | : |
Author | : Ernst Obermeier |
Publisher | : Springer |
Total Pages | : 1763 |
Release | : 2016-05-12 |
Genre | : Technology & Engineering |
ISBN | : 3642594972 |
The Conference is the premier international meeting for the presentation of original work addressing all aspects of the theory, design, fabrication, assembly, packaging, testing and application of solid-state sensors, actuators, MEMS, and microsystems.
Author | : Arokia Nathan |
Publisher | : Springer Science & Business Media |
Total Pages | : 445 |
Release | : 2012-12-06 |
Genre | : Technology & Engineering |
ISBN | : 3709164281 |
Computer-aided-design (CAD) of semiconductor microtransducers is relatively new in contrast to their counterparts in the integrated circuit world. Integrated silicon microtransducers are realized using microfabrication techniques similar to those for standard integrated circuits (ICs). Unlike IC devices, however, microtransducers must interact with their environment, so their numerical simulation is considerably more complex. While the design of ICs aims at suppressing "parasitic” effects, microtransducers thrive on optimizing the one or the other such effect. The challenging quest for physical models and simulation tools enabling microtransducer CAD is the topic of this book. The book is intended as a text for graduate students in Electrical Engineering and Physics and as a reference for CAD engineers in the microsystems industry.
Author | : Zhaoying Zhou |
Publisher | : Springer Science & Business Media |
Total Pages | : 1011 |
Release | : 2012-08-30 |
Genre | : Technology & Engineering |
ISBN | : 3642182933 |
“Microsystems and Nanotechnology” presents the latest science and engineering research and achievements in the fields of microsystems and nanotechnology, bringing together contributions by authoritative experts from the United States, Germany, Great Britain, Japan and China to discuss the latest advances in microelectromechanical systems (MEMS) technology and micro/nanotechnology. The book is divided into five parts – the fundamentals of microsystems and nanotechnology, microsystems technology, nanotechnology, application issues, and the developments and prospects – and is a valuable reference for students, teachers and engineers working with the involved technologies. Professor Zhaoying Zhou is a professor at the Department of Precision Instruments & Mechanology , Tsinghua University , and the Chairman of the MEMS & NEMS Society of China. Dr. Zhonglin Wang is the Director of the Center for Nanostructure Characterization, Georgia Tech, USA. Dr. Liwei Lin is a Professor at the Department of Mechanical Engineering, University of California at Berkeley, USA.
Author | : Evgeni Gusev |
Publisher | : Springer |
Total Pages | : 310 |
Release | : 2010-03-03 |
Genre | : Technology & Engineering |
ISBN | : 9048138078 |
A NATO Advanced Research Workshop (ARW) entitled “Advanced Materials and Technologies for Micro/Nano Devices, Sensors and Actuators” was held in St. Petersburg, Russia, from June 29 to July 2, 2009. The main goal of the Workshop was to examine (at a fundamental level) the very complex scientific issues that pertain to the use of micro- and nano-electromechanical systems (MEMS and NEMS), devices and technologies in next generation commercial and defen- related applications. Micro- and nano-electromechanical systems represent rather broad and diverse technological areas, such as optical systems (micromirrors, waveguides, optical sensors, integrated subsystems), life sciences and lab equipment (micropumps, membranes, lab-on-chip, membranes, microfluidics), sensors (bio-sensors, chemical sensors, gas-phase sensors, sensors integrated with electronics) and RF applications for signal transmission (variable capacitors, tunable filters and antennas, switches, resonators). From a scientific viewpoint, this is a very multi-disciplinary field, including micro- and nano-mechanics (such as stresses in structural materials), electronic effects (e. g. charge transfer), general electrostatics, materials science, surface chemistry, interface science, (nano)tribology, and optics. It is obvious that in order to overcome the problems surrounding next-generation MEMS/NEMS devices and applications it is necessary to tackle them from different angles: theoreticians need to speak with mechanical engineers, and device engineers and modelers to listen to surface physicists. It was therefore one of the main objectives of the workshop to bring together a multidisciplinary team of distinguished researchers.