Science And Technology Of Defects In Silicon
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Author | : C.A.J. Ammerlaan |
Publisher | : Elsevier |
Total Pages | : 518 |
Release | : 2014-01-01 |
Genre | : Technology & Engineering |
ISBN | : 0080983642 |
Download Science and Technology of Defects in Silicon Book in PDF, Epub and Kindle
This volume reviews recent developments in the materials science of silicon. The topics discussed range from the fundamental characterization of the physical properties to the assessment of materials for device applications, and include: crystal growth; process-induced defects; topography; hydrogenation of silicon; impurities; and complexes and interactions between impurities. In view of its key position within the conference scope, several papers examine process induced defects: defects due to ion implantation, silicidation and dry etching, with emphasis being placed on the device aspects. Special attention is also paid to recent developments in characterization techniques on epitaxially grown silicon, and silicon-on-insulators.
Author | : Cornelis Antonius Josephus Ammerlaan |
Publisher | : |
Total Pages | : 505 |
Release | : 1991 |
Genre | : |
ISBN | : |
Download Science and Technology of Defects in Silicon Book in PDF, Epub and Kindle
Author | : Howard R. Huff |
Publisher | : The Electrochemical Society |
Total Pages | : 894 |
Release | : 1998 |
Genre | : Technology & Engineering |
ISBN | : 9781566771931 |
Download Silicon Materials Science and Technology Book in PDF, Epub and Kindle
Author | : Yutaka Yoshida |
Publisher | : Springer |
Total Pages | : 498 |
Release | : 2016-03-30 |
Genre | : Technology & Engineering |
ISBN | : 4431558004 |
Download Defects and Impurities in Silicon Materials Book in PDF, Epub and Kindle
This book emphasizes the importance of the fascinating atomistic insights into the defects and the impurities as well as the dynamic behaviors in silicon materials, which have become more directly accessible over the past 20 years. Such progress has been made possible by newly developed experimental methods, first principle theories, and computer simulation techniques. The book is aimed at young researchers, scientists, and technicians in related industries. The main purposes are to provide readers with 1) the basic physics behind defects in silicon materials, 2) the atomistic modeling as well as the characterization techniques related to defects and impurities in silicon materials, and 3) an overview of the wide range of the research fields involved.
Author | : C. A. J. Ammerlaan |
Publisher | : |
Total Pages | : 0 |
Release | : 1989 |
Genre | : Semiconductors |
ISBN | : 9780444886194 |
Download Defects in Silicon Book in PDF, Epub and Kindle
Author | : Gianfranco Pacchioni |
Publisher | : Springer Science & Business Media |
Total Pages | : 636 |
Release | : 2000-12-31 |
Genre | : Medical |
ISBN | : 9780792366850 |
Download Defects in SiO2 and Related Dielectrics: Science and Technology Book in PDF, Epub and Kindle
Proceedings of the NATO Advanced Study Institute, Erice, Italy, April 8-20, 2000
Author | : |
Publisher | : |
Total Pages | : 800 |
Release | : 1998 |
Genre | : Semiconductors |
ISBN | : |
Download Silicon Materials Science and Technology Book in PDF, Epub and Kindle
Author | : |
Publisher | : |
Total Pages | : 505 |
Release | : 1989 |
Genre | : |
ISBN | : |
Download Proceedings of Symposium B on Science and Technology of Defects in Silicon of the E-MRS Meeting Book in PDF, Epub and Kindle
Author | : Giorgio Benedek |
Publisher | : Springer Science & Business Media |
Total Pages | : 286 |
Release | : 2013-06-29 |
Genre | : Science |
ISBN | : 1468457098 |
Download Point and Extended Defects in Semiconductors Book in PDF, Epub and Kindle
The systematic study of defects in semiconductors began in the early fifties. FrQm that time on many questions about the defect structure and properties have been an swered, but many others are still a matter of investigation and discussion. Moreover, during these years new problems arose in connection with the identification and char acterization of defects, their role in determining transport and optical properties of semiconductor materials and devices, as well as from the technology of the ever in creasing scale of integration. This book presents to the reader a view into both basic concepts of defect physics and recent developments of high resolution experimental techniques. The book does not aim at an exhaustive presentation of modern defect physics; rather it gathers a number of topics which represent the present-time research in this field. The volume collects the contributions to the Advanced Research Workshop "Point, Extended and Surface Defects in Semiconductors" held at the Ettore Majo rana Centre at Erice (Italy) from 2 to 7 November 1988, in the framework of the International School of Materials Science and Technology. The workshop has brought together scientists from thirteen countries. Most participants are currently working on defect problems in either silicon submicron technology or in quantum wells and superlattices, where point defects, dislocations, interfaces and surfaces are closely packed together.
Author | : C. A. J. Ammerlaan |
Publisher | : North Holland |
Total Pages | : 505 |
Release | : 1989-01-01 |
Genre | : Technology & Engineering |
ISBN | : 9780444886194 |
Download Defects in Silicon Book in PDF, Epub and Kindle
This volume reviews recent developments in the materials science of silicon. The topics discussed range from the fundamental characterization of the physical properties to the assessment of materials for device applications, and include: crystal growth; process-induced defects; topography; hydrogenation of silicon; impurities; and complexes and interactions between impurities. In view of its key position within the conference scope, several papers examine process induced defects: defects due to ion implantation, silicidation and dry etching, with emphasis being placed on the device aspects. Special attention is also paid to recent developments in characterization techniques on epitaxially grown silicon, and silicon-on-insulators.