Chemical Mechanical Planarization in IC Device Manufacturing III

Chemical Mechanical Planarization in IC Device Manufacturing III
Author: Robert Leon Opila
Publisher: The Electrochemical Society
Total Pages: 664
Release: 2000
Genre: Technology & Engineering
ISBN: 9781566772600

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This volume contains the proceedings of the third international symposium on Chemical Mechanical Planarization integrated circuit device manufacturing held at the 196th Meeting of the Electrochemical Society in Honolulu, Hawaii. ( October 20 -22 1999).

Cumulated Index to the Books

Cumulated Index to the Books
Author:
Publisher:
Total Pages: 1134
Release: 1999
Genre: American literature
ISBN:

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Chemical Mechanical Planarization IV

Chemical Mechanical Planarization IV
Author: R. L. Opila
Publisher: The Electrochemical Society
Total Pages: 350
Release: 2001
Genre: Technology & Engineering
ISBN: 9781566772938

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Chemical Mechanical Planarization VI

Chemical Mechanical Planarization VI
Author: Sudipta Seal
Publisher: The Electrochemical Society
Total Pages: 370
Release: 2003
Genre: Technology & Engineering
ISBN: 9781566774048

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