Principles Of Plasma Discharges And Materials Processing
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Author | : Michael A. Lieberman |
Publisher | : John Wiley & Sons |
Total Pages | : 795 |
Release | : 2005-04-08 |
Genre | : Science |
ISBN | : 0471724246 |
Download Principles of Plasma Discharges and Materials Processing Book in PDF, Epub and Kindle
A Thorough Update of the Industry Classic on Principles of Plasma Processing The first edition of Principles of Plasma Discharges and Materials Processing, published over a decade ago, was lauded for its complete treatment of both basic plasma physics and industrial plasma processing, quickly becoming the primary reference for students and professionals. The Second Edition has been carefully updated and revised to reflect recent developments in the field and to further clarify the presentation of basic principles. Along with in-depth coverage of the fundamentals of plasma physics and chemistry, the authors apply basic theory to plasma discharges, including calculations of plasma parameters and the scaling of plasma parameters with control parameters. New and expanded topics include: * Updated cross sections * Diffusion and diffusion solutions * Generalized Bohm criteria * Expanded treatment of dc sheaths * Langmuir probes in time-varying fields * Electronegative discharges * Pulsed power discharges * Dual frequency discharges * High-density rf sheaths and ion energy distributions * Hysteresis and instabilities * Helicon discharges * Hollow cathode discharges * Ionized physical vapor deposition * Differential substrate charging With new chapters on dusty plasmas and the kinetic theory of discharges, graduate students and researchers in the field of plasma processing should find this new edition more valuable than ever.
Author | : |
Publisher | : |
Total Pages | : |
Release | : 1994 |
Genre | : |
ISBN | : |
Download Principles of Plasma Discharges and Materials Processing Book in PDF, Epub and Kindle
Author | : Francis F. Chen |
Publisher | : Springer Science & Business Media |
Total Pages | : 213 |
Release | : 2012-12-06 |
Genre | : Science |
ISBN | : 1461501814 |
Download Lecture Notes on Principles of Plasma Processing Book in PDF, Epub and Kindle
Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are experts in each of these fields, and their collaboration results in the merging of these fields with a common terminology. Basic plasma concepts are introduced painlessly to those who have studied undergraduate electromagnetics but have had no previous exposure to plasmas. Unnecessarily detailed derivations are omitted; yet the reader is led to understand in some depth those concepts, such as the structure of sheaths, that are important in the design and operation of plasma processing reactors. Physicists not accustomed to low-temperature plasmas are introduced to chemical kinetics, surface science, and molecular spectroscopy. The material has been condensed to suit a nine-week graduate course, but it is sufficient to bring the reader up to date on current problems such as copper interconnects, low-k and high-k dielectrics, and oxide damage. Students will appreciate the web-style layout with ample color illustrations opposite the text, with ample room for notes. This short book is ideal for new workers in the semiconductor industry who want to be brought up to speed with minimum effort. It is also suitable for Chemical Engineering students studying plasma processing of materials; Engineers, physicists, and technicians entering the semiconductor industry who want a quick overview of the use of plasmas in the industry.
Author | : National Research Council |
Publisher | : National Academies Press |
Total Pages | : 88 |
Release | : 1991-02-01 |
Genre | : Technology & Engineering |
ISBN | : 0309045975 |
Download Plasma Processing of Materials Book in PDF, Epub and Kindle
Plasma processing of materials is a critical technology to several of the largest manufacturing industries in the worldâ€"electronics, aerospace, automotive, steel, biomedical, and toxic waste management. This book describes the relationship between plasma processes and the many industrial applications, examines in detail plasma processing in the electronics industry, highlights the scientific foundation underlying this technology, and discusses education issues in this multidisciplinary field. The committee recommends a coordinated, focused, and well-funded research program in this area that involves the university, federal laboratory, and industrial sectors of the community. It also points out that because plasma processing is an integral part of the infrastructure of so many American industries, it is important for both the economy and the national security that America maintain a strong leadership role in this technology.
Author | : Nicholas A. Krall |
Publisher | : San Francisco Press, Incorporated |
Total Pages | : 692 |
Release | : 1986 |
Genre | : Science |
ISBN | : |
Download Principles of Plasma Physics Book in PDF, Epub and Kindle
Author | : Brian Chapman |
Publisher | : Wiley-Interscience |
Total Pages | : 434 |
Release | : 1980 |
Genre | : Science |
ISBN | : |
Download Glow Discharge Processes Book in PDF, Epub and Kindle
Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.
Author | : Setsuo Ichimaru |
Publisher | : CRC Press |
Total Pages | : 352 |
Release | : 2018-03-08 |
Genre | : Science |
ISBN | : 0429970668 |
Download Basic Principles Of Plasma Physics Book in PDF, Epub and Kindle
The book describes a statistical approach to the basics of plasma physics.
Author | : Dwight Roy Nicholson |
Publisher | : |
Total Pages | : 312 |
Release | : 1983 |
Genre | : Science |
ISBN | : |
Download Introduction to Plasma Theory Book in PDF, Epub and Kindle
Provides a complete introduction to plasma physics as taught in a 1-year graduate course. Covers all important topics of plasma theory, omitting no mathematical steps in derivations. Covers solitons, parametric instabilities, weak turbulence theory, and more. Includes exercises and problems which apply theories to practical examples. 4 of the 10 chapters do not include complex variables and can be used for a 1-semester senior level undergraduate course.
Author | : Pascal Chabert |
Publisher | : Cambridge University Press |
Total Pages | : 392 |
Release | : 2011-02-24 |
Genre | : Science |
ISBN | : 9780521763004 |
Download Physics of Radio-Frequency Plasmas Book in PDF, Epub and Kindle
Low-temperature radio frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on physics, this book will interest graduate students and researchers in applied physics and electrical engineering. The book incorporates a cutting-edge perspective on RF plasmas. It also covers basic plasma physics including transport in bounded plasmas and electrical diagnostics. Its pedagogic style engages readers, helping them to develop physical arguments and mathematical analyses. Worked examples apply the theories covered to realistic scenarios, and over 100 in-text questions let readers put their newly acquired knowledge to use and gain confidence in applying physics to real laboratory situations.
Author | : Hubert Rauscher |
Publisher | : John Wiley & Sons |
Total Pages | : 428 |
Release | : 2010-04-16 |
Genre | : Technology & Engineering |
ISBN | : 9783527630462 |
Download Plasma Technology for Hyperfunctional Surfaces Book in PDF, Epub and Kindle
Based on a project backed by the European Union, this is a must-have resource for researchers in industry and academia concerned with application-oriented plasma technology research. Clearly divided in three sections, the first part is dedicated to the fundamentals of plasma and offers information about scientific and theoretical plasma topics, plasma production, surface treatment process and characterization. The second section focuses on technological aspects and plasma process applications in textile, food packaging and biomedical sectors, while the final part is devoted to concerns about the environmental sustainability of plasma processes.