Piezoelectric MEMS Resonator Characterization and Filter Design

Piezoelectric MEMS Resonator Characterization and Filter Design
Author: Joung-Mo Kang
Publisher:
Total Pages: 100
Release: 2004
Genre:
ISBN:

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(Cont.) The filter analyses bring to light two major goals for the next stage of resonator development. First, an accurate tuning method must be devised as the resonator bar's small size makes manufacturing errors on the order of tens of nanometers significantly affect filter characteristics. Second, a lower impedance level for the resonator is desirable to allow robust interaction with integrated RF circuitry.

Piezoelectric MEMS Resonators

Piezoelectric MEMS Resonators
Author: Harmeet Bhugra
Publisher: Springer
Total Pages: 423
Release: 2017-01-09
Genre: Technology & Engineering
ISBN: 3319286889

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This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ...and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.

MEMS Resonator Filters

MEMS Resonator Filters
Author: Rajendra M. Patrikar
Publisher: Institution of Engineering and Technology
Total Pages: 439
Release: 2020-06-15
Genre: Technology & Engineering
ISBN: 1785618962

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The use of MEMS resonators for signal processing is relatively new and has the potential to change the topology of newer generation circuits. New materials, design and fabrication processes, and integration with conventional circuitry will need to be considered. This book explores the challenges and opportunities of developing circuits with MEMS resonator filters. The replacement of classical electrical components with electromechanical components is explored in this book, and the specific properties of MEMS resonators required in various frequency ranges are discussed. Materials and their selection, CAD tools for system design and the integration of MEMS with CMOS circuitry, and the design, fabrication, testing and packaging of MEMS filters themselves are addressed in detail. Case studies where resonator MEMS have been used as components have been included to encourage readers to consider the practical applications of this technology. MEMS Resonator Filters is essential reading for the analogue circuit designer community, particularly those who are designing circuits for wireless communications, and CMOS technology researchers and engineers who are involved in the fabrication of circuits. Designers of sensors and interfacing circuits will also be interested since resonators are also being used as sensors.

Design of Width-extensional, Piezoelectric Radio Frequency Microelectromechanical System Resonators and Filters

Design of Width-extensional, Piezoelectric Radio Frequency Microelectromechanical System Resonators and Filters
Author: Jonathan A. Cox
Publisher:
Total Pages: 121
Release: 2007
Genre:
ISBN:

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Existing width-extensional, piezoelectric resonators (LBARs) suffer from high motional resistance and susceptibility to manufacturing disorder. Attempts to lower motional resistance by connecting many LBARs electrically in parallel fail because such schemes are highly susceptible to the disorder inherent in the fabrication process. The manufacturing precision, not the minimum feature size, presently limits the maximum frequency for which a resonator or filter array can be fabricated. However, the effect of disorder in a group of resonators can be reduced with mechanical coupling. Therefore, we present a novel approach that is disorder tolerant, allowing for the fabrication of higher frequency, lower impedance LBAR-based resonators and filters. This novel resonator defeats the aspect ratio limitations imposed by the Poisson effect through stress-relieving slits. By etching narrow slits in a long bar, it is constrained to act as a single LBAR-without the spurious modes which would otherwise result. In addition, the admittance of the new array scales well with the number of unit cells, permitting the length of the array to be extended in one or two dimensions until the motional resistance is reduced to an adequate level. Finite element analysis techniques for disorder simulation and filter design are explored. Radiated acoustic power (anchor loss) is analyzed with finite element simulations with absorbing boundaries. Finally, a thorough discussion of filter design with the new resonator array, as well as a comparison of various filter topologies, is conducted.

Acoustic Wave and Electromechanical Resonators

Acoustic Wave and Electromechanical Resonators
Author: Humberto Campanella
Publisher: Artech House
Total Pages: 364
Release: 2010
Genre: Technology & Engineering
ISBN: 1607839784

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This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensing and RF systems. Moreover, this one-stop resource looks at the main characteristics, differences, and limitations of FBAR, MEMS, and NEMS devices, helping you to choose the right approaches for your projects. Over 280 illustrations and more than 130 equations support key topics throughout the book.

MEMS Linear and Nonlinear Statics and Dynamics

MEMS Linear and Nonlinear Statics and Dynamics
Author: Mohammad I. Younis
Publisher: Springer Science & Business Media
Total Pages: 463
Release: 2011-06-27
Genre: Technology & Engineering
ISBN: 1441960201

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MEMS Linear and Nonlinear Statics and Dynamics presents the necessary analytical and computational tools for MEMS designers to model and simulate most known MEMS devices, structures, and phenomena. This book also provides an in-depth analysis and treatment of the most common static and dynamic phenomena in MEMS that are encountered by engineers. Coverage also includes nonlinear modeling approaches to modeling various MEMS phenomena of a nonlinear nature, such as those due to electrostatic forces, squeeze-film damping, and large deflection of structures. The book also: Includes examples of numerous MEMS devices and structures that require static or dynamic modeling Provides code for programs in Matlab, Mathematica, and ANSYS for simulating the behavior of MEMS structures Provides real world problems related to the dynamics of MEMS such as dynamics of electrostatically actuated devices, stiction and adhesion of microbeams due to electrostatic and capillary forces MEMS Linear and Nonlinear Statics and Dynamics is an ideal volume for researchers and engineers working in MEMS design and fabrication.

Resonant Spectrum Method to Characterize Piezoelectric Films in Composite Resonators

Resonant Spectrum Method to Characterize Piezoelectric Films in Composite Resonators
Author: Yuxing Zhang
Publisher:
Total Pages: 0
Release: 2002
Genre: Electric resonators
ISBN:

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Resonant Spectrum Method, a direct method to characterize a piezoelectric film which is deposited on a substrate to form a composite resonator (also known as over-moded resonator), has been developed. Based on the parallel and series resonant frequency spectra of a composite resonator, with the calculation of the spacing of the parallel resonant frequencies and the effective coupling coefficient, the electromechanical coupling factor, the density, and the elastic constant of the piezoelectric film can be evaluated directly. Experimental results on samples consisted of ZnO films on fused quartz substrates with different thicknesses are presented. They show good agreement with numerical simulations. The effects of the electrode thickness, the mechanical loss and the contact/electrode resistance on the accuracy of this method have also been investigated and it is found that the electrode thickness manifestly affects the accuracy of the method. The mechanical loss of the piezoelectric film has no significant impact. The contact/electrode resistance has some effect but this can be corrected. Applications of the method in piezoelectric film characterization and resonator filter design have been described.