Mems/Nems

Mems/Nems
Author: Cornelius T. Leondes
Publisher: Springer Science & Business Media
Total Pages: 2142
Release: 2007-10-08
Genre: Technology & Engineering
ISBN: 0387257861

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This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.

Laser Micro-Nano-Manufacturing and 3D Microprinting

Laser Micro-Nano-Manufacturing and 3D Microprinting
Author: Anming Hu
Publisher: Springer Nature
Total Pages: 360
Release: 2020-11-28
Genre: Science
ISBN: 3030593134

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This book provides a comprehensive overview of the latest advances in laser techniques for micro-nano-manufacturing and an in-depth analysis of applications, such as 3D printing and nanojoining. Lasers have gained increasing significance as a precise tool for advanced manufacturing. Written by world leading scientists, the first part of the book presents the fundamentals of laser interaction with materials at the micro- and nanoscale, including multiphoton excitation and nonthermal melting, and allows readers to better understand advanced processing. In the second part, the authors focus on various advanced fabrications, such as laser peening, surface nanoengineering, and plasmonic heating. Finally, case studies are devoted to special applications, such as 3D printing, microfluidics devices, energy devices, and plasmonic and photonic waveguides. This book integrates both theoretical and experimental analysis. The combination of tutorial chapters and concentrated case studies will be critically attractive to undergraduate and graduate students, researchers, and engineers in the relevant fields. Readers will grasp the full picture of the application of laser for micro-nanomanufacturing and 3D printing.

Fabrication and Characterization in the Micro-Nano Range

Fabrication and Characterization in the Micro-Nano Range
Author: Fernando A. Lasagni
Publisher: Springer Science & Business Media
Total Pages: 227
Release: 2011-03-23
Genre: Technology & Engineering
ISBN: 3642177824

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This book shows an update in the field of micro/nano fabrications techniques of two and three dimensional structures as well as ultimate three dimensional characterization methods from the atom range to the micro scale. Several examples are presented showing their direct application in different technological fields such as microfluidics, photonics, biotechnology and aerospace engineering, between others. The effects of the microstructure and topography on the macroscopic properties of the studied materials are discussed, together with a detailed review of 3D imaging techniques.

The Physics of Micro/Nano-Fabrication

The Physics of Micro/Nano-Fabrication
Author: Ivor Brodie
Publisher: Springer Science & Business Media
Total Pages: 661
Release: 2013-06-29
Genre: Science
ISBN: 1475767757

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In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.

Microstereolithography and Other Fabrication Techniques for 3D MEMS

Microstereolithography and Other Fabrication Techniques for 3D MEMS
Author: Vijay K. Varadan
Publisher: John Wiley & Sons
Total Pages: 290
Release: 2001-03-30
Genre: Technology & Engineering
ISBN:

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This timely and accessible book focusses on microstereolithography and other microfabrication for 3D MEMS. The application of MEMS (micro-electro-mechanical systems) in such diverse fields as intelligent microsensors, data storage, biomedical engineering and wireless communications is booming, but although many MEMS books are available, this book is unique in that most others deal with 2D MEMS. This volume discusses the fundamental principles of microstereolithography for fabrication of 3D MEMS devices, providing an account of recent developments in related microfabrication and combined architecture techniques, and illustrating their application in the engineering and medical fields. It provides: * A unique and accessible overview of micro-system manufacture using the latest semiconductor processing techniques * Coverage of the developmental history of MEMS, micro-sensors, actuators and signal processing units * Insight to a range of microfabrication techniques from laser ablation to x-ray lithography, silicon micro-machining and micro-moulding * Describes the latest fabrication prototypes and applications, including thin-film transistors, antennas, wireless telemetry systems and transducers This book will appeal to microelectronics engineers, as well as material technologists, and physicists working in industrial and academic research and development.

MEMS Materials and Processes Handbook

MEMS Materials and Processes Handbook
Author: Reza Ghodssi
Publisher: Springer Science & Business Media
Total Pages: 1211
Release: 2011-03-18
Genre: Technology & Engineering
ISBN: 0387473181

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MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.