Optical Properties of MacEtch-fabricated Porous Silicon Nanowire Arrays

Optical Properties of MacEtch-fabricated Porous Silicon Nanowire Arrays
Author: Kyle G. Tezanos
Publisher:
Total Pages: 0
Release: 2022
Genre: Electrochemistry
ISBN:

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"The increasing demand for complex devices that utilize unique, three-dimensional nanostructures has spurred the development of controllable and versatile semiconductor fabrication techniques. However, there exists a need to refine such methodologies to overcome existing processing constraints that compromise device performance and evolution. Conventional wet etching techniques (e.g., crystallographic KOH etching of Si) successfully generate textured Si structures with smooth sidewalls but lack the capabilities of controllably producing high aspect-ratio structures. Alternatively, dry etching techniques (e.g., reactive-ion etching), while highly controllable and capable of generating vertically aligned, high aspect-ratio structures for IC technologies, introduce considerable sidewall and lattice damage as a result of high-energy ion bombardment that may compromise device performance. Metal-assisted chemical etching (MacEtch) provides an alternative process that is capable of anisotropically generating high aspect-ratio micro and nanostructures using a room temperature, solution-based technique. This fabrication process employs an appropriate metal catalyst (e.g., Au, Ag, Pt, Pd) to induce etching in several semiconducting materials (e.g., Si, GaAs) submerged in a solution containing an oxidant and an etchant. The MacEtch process resembles a galvanic cell such that cathodic and anodic half reactions take place at the catalyst/solution interface and catalyst/substrate interface, respectively. At the cathode, the metal catalyzes the reduction of the oxidant resulting in the generation and accumulation of charge carriers (e.g., holes, h+) that are subsequently injected into the underlying substrate at the anode. This results in the formation of oxide species that are preferentially dissolved by the etchant. Thus, MacEtch provides a tunable, top-down, catalytic fabrication technique enabling greater process control and versatility for generating high aspect-ratio semiconductor structures. In this thesis, Au and Au/Pd catalyzed MacEtch is used to generate ultradeep Si micropillar structures, and porous SiNW (p-SiNW) arrays with enhanced optical properties. Using a combination of Au-MacEtch and a crystallographic KOH etch, Si micropillars with ~100 [micron] height were fabricated with up to 70 [micron] clearance between pillars to allow efficient fluid flow for optical detection of viral particles. Alternatively, porous SiNW arrays fabricated via AuPd- MacEtch demonstrated broadband absorption ≥ 90% from 200 – 900 nm and were shown to outperform RCWA-simulated SiNW arrays with similar morphologies. Additionally, photoluminescence (PL) spectra collected from as prepared p-SiNW showed significant enhancement in intensity centered near 650 nm as etch depth increased from 30 [microns] to 100 [microns], attributed to an increase in the porous volume. Using atomic layer deposition (ALD) the p-SiNW were passivated using alumina (Al2O3) and hafnia (HfO2) thin films in addition to ITO thin films deposited via sputtering. PL intensity also increased after ALD passivation, attributed to a quenching effect on non-radiative SRH recombination sites on the NW surfaces, with a red shift in the peak wavelength as ALD film thickness increased from 10 nm to 50 nm, resulting from strain effects acting on the NW themselves. These results show promise in such micropillar and coated and uncoated p-SiNW structures towards applications in microfluidic devices, and indoor light-harvesting and outdoor solar-based technologies."--Abstract.

Handbook of Porous Silicon

Handbook of Porous Silicon
Author: Leigh Canham
Publisher: Springer
Total Pages: 1000
Release: 2021-01-14
Genre: Technology & Engineering
ISBN: 9783319045085

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The Handbook of Porous Silicon brings together the expertise of a large, international team of almost 100 academic researchers, engineers, and product developers from industry across electronics, medicine, nutrition and consumer care to summarize the field in its entirity with 150 chapters and 5000 references. The volume presents 5 parts which cover fabrication techniques, material properties, characterization techniques, processing and applications. Much attention was given in the the past to its luminescent properties, but increasingly it is the biodegradability, mechanical, thermal and sensing capabilities that are attracting attention. The volume is divided into focussed data reviews with, wherever possible, quantitative rather than qualitative descriptions of both properties and performance. The book is targeted at undergraduates, postgraduates, and experienced researchers.

Silicon Nanomaterials Sourcebook

Silicon Nanomaterials Sourcebook
Author: Klaus D. Sattler
Publisher: CRC Press
Total Pages: 664
Release: 2017-07-28
Genre: Science
ISBN: 149876388X

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This comprehensive tutorial guide to silicon nanomaterials spans from fundamental properties, growth mechanisms, and processing of nanosilicon to electronic device, energy conversion and storage, biomedical, and environmental applications. It also presents core knowledge with basic mathematical equations, tables, and graphs in order to provide the reader with the tools necessary to understand the latest technology developments. From low-dimensional structures, quantum dots, and nanowires to hybrid materials, arrays, networks, and biomedical applications, this Sourcebook is a complete resource for anyone working with this materials: Covers fundamental concepts, properties, methods, and practical applications. Focuses on one important type of silicon nanomaterial in every chapter. Discusses formation, properties, and applications for each material. Written in a tutorial style with basic equations and fundamentals included in an extended introduction. Highlights materials that show exceptional properties as well as strong prospects for future applications. Klaus D. Sattler is professor physics at the University of Hawaii, Honolulu, having earned his PhD at the Swiss Federal Institute of Technology (ETH) in Zurich. He was honored with the Walter Schottky Prize from the German Physical Society, and is the editor of the sister work also published by Taylor & Francis, Carbon Nanomaterials Sourcebook, as well as the acclaimed multi-volume Handbook of Nanophysics.

Fabrication and Characterization of Vertical Silicon Nanowire Arrays

Fabrication and Characterization of Vertical Silicon Nanowire Arrays
Author: Jeffrey M. Weisse
Publisher:
Total Pages:
Release: 2013
Genre:
ISBN:

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Thermoelectric devices, which convert temperature gradients into electricity, have the potential to harness waste heat to improve overall energy efficiency. However, current thermoelectric devices are not cost-effective for most applications due to their low efficiencies and high material costs. To improve the overall conversion efficiency, thermoelectric materials should possess material properties that closely resemble a "phonon glass" and an "electron crystal". The desired low thermal and high electrical conductivities allow the thermoelectric device to maintain a high temperature gradient while effectively transporting current. Unfortunately, thermal transport and electrical transport are a closely coupled phenomena and it is difficult to independently engineer each specific conduction mechanism in conventional materials. One strategy to realize this is to generate nanostructured silicon (e.g. silicon nanowires (SiNWs)), which have been shown to reduce thermal conductivity ([kappa]) through enhanced phonon scattering while theoretically preserving the electronic properties; therefore, improving the overall device efficiency. The ability to suppress phonon propagation in nanostructured silicon, which has a bulk phonon mean free path ~ 300 nm at 300 K, has raised substantial interest as an ultra-low [kappa] material capable of reducing the thermal conductivity up to three orders of magnitude lower than that of bulk silicon. While the formation of porous silicon and SiNWs has individually been demonstrated as promising methods to reduce [kappa], there is a lack of research investigating the thermal conductivity in SiNWs containing porosity. We fabricated SiNW arrays using top-down etching methods (deep reactive ion etching and metal-assisted chemical etching) and by tuning the diameter with different patterning methods and tuning the internal porosity with different SiNW etching conditions. The effects of both the porosity and the SiNW dimensions at the array scale are investigated by measuring [kappa] of vertical SiNW arrays using a nanosecond time-domain thermoreflectance technique. In addition to thermoelectric devices, vertical SiNW arrays, due to their anisotropic electronic and optical properties, large surface to volume ratios, resistance to Li-ion pulverization, ability to orthogonalize light absorption and carrier transport directions, and trap light, make vertical SiNW arrays important building blocks for various applications. These may include sensors, solar cells, and Li-ion batteries. Many of these applications benefit from vertical SiNW arrays fabricated on non-silicon based substrates which endow the final devices with the properties of flexibility, transparency, and light-weight while removing any performance limitation of the silicon fabrication substrate. We then developed two vertical transfer printing methods (V-TPMs) that are used to detach SiNW arrays from their original fabrication substrates and subsequently attach them to any desired substrate while retaining their vertical alignment over a large area. The transfer of vertically aligned arrays of uniform length SiNWs is desirable to remove the electrical, thermal, optical, and structural impact from the fabrication substrate and also to enable the integration of vertical SiNWs directly into flexible and conductive substrates. Moreover, realization of a thermoelectric device requires the formation of electrical contacts on both sides of the SiNW arrays. We formed metallic contacts on both ends of the SiNW arrays with a mechanical supporting and electrical insulating polymer in between. Electrical characterization of the SiNW devices exhibited good current-voltage (I-V) characteristics independent of substrates materials and bending conditions. We believe the V-TPMs developed in this work have great potential for manufacturing practical thermoelectric devices as well as high performing, scalable SiNW array devices on flexible and conducting substrates.

Electrochemically Engineered Nanoporous Materials

Electrochemically Engineered Nanoporous Materials
Author: Dusan Losic
Publisher: Springer
Total Pages: 377
Release: 2015-07-18
Genre: Technology & Engineering
ISBN: 3319203460

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This book provides in-depth knowledge about the fabrications, structures, properties and applications of three outstanding electrochemically engineered nanoporous materials including porous silicon, nanoporous alumina and nanotubular titania. The book integrates three major themes describing these materials. The first theme is on porous silicon reviewing the methods for preparation by electrochemical etching, properties and methods for surface functionalization relevant for biosensing applications. Biomedical applications of porous silicon are major focus, described in several chapters reviewing recent developments on bioanalysis, emerging capture probes and drug delivery. The second theme on nanoporous alumina starts with describing the concept of self-organized electrochemical process used for synthesis nanopore and nanotube structures of valve metal oxides and reviewing recent development and progress on this field. The following chapters are focused mainly on optical properties and biosensing application of nanoporous alumina providing the reader with the depth of understanding of the structure controlled optical and photonic properties and design of optical biosensing devices using different detection principles such as photoluminescence, surface plasmon resonance, reflective spectrometry, wave guiding, Raman scattering etc. The third theme is focused on nanotubular titania reviewing three key applications including photocatalysis, solar cells and drug delivery. The book represents an important resource for academics, researchers, industry professionals, post-graduate and high-level undergraduate students providing them with both an overview of the current state-of-the-art on these materials and their future developments.

Silicon and Silicide Nanowires

Silicon and Silicide Nanowires
Author: Yu Huang
Publisher: CRC Press
Total Pages: 472
Release: 2016-04-19
Genre: Science
ISBN: 981430347X

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Nanoscale materials are showing great promise in various electronic, optoelectronic, and energy applications. Silicon (Si) has especially captured great attention as the leading material for microelectronic and nanoscale device applications. Recently, various silicides have garnered special attention for their pivotal role in Si device engineering

Energy Materials

Energy Materials
Author: Bibhu Prasad Swain
Publisher: Springer Nature
Total Pages: 272
Release: 2023-07-27
Genre: Technology & Engineering
ISBN: 981993866X

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This book presents the latest progress in energy materials, energy storage, batteries, and supercapacitors. The contents include topics such as fundamentals of energy materials, photovoltaic materials and devices, electrochemical energy conversion and storage, and lighting and light-emitting diodes. Chapters include experimental approaches to device fabrication, photovoltaics and supercapacitors applications, etc. It also discusses energy materials' characterization, preparation methods, and performance testing techniques. The book provides ideas on the design and development of nanoscale devices and covers various applications of nanomaterials. This book is useful for researchers and professionals working in the fields of materials science.

Synchrotron Radiation in Materials Science

Synchrotron Radiation in Materials Science
Author: Chunhai Fan
Publisher: John Wiley & Sons
Total Pages: 846
Release: 2018-05-29
Genre: Technology & Engineering
ISBN: 3527339868

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Meeting the long-felt need for in-depth information on one of the most advanced material characterization methods, a top team of editors and authors from highly prestigious facilities and institutions covers a range of synchrotron techniques that have proven useful for materials research. Following an introduction to synchrotron radiation and its sources, the second part goes on to describe the various techniques that benefit from this especially bright light, including X-ray absorption, diffraction, scattering, imaging, and lithography. The thrid and final part provides an overview of the applications of synchrotron radiation in materials science. bridging the gap between specialists in synchrotron research and material scientists, this is a unique and indispensable resource for academic and industrial researchers alike.

Photovoltaic Manufacturing

Photovoltaic Manufacturing
Author: Monika Freunek Muller
Publisher: John Wiley & Sons
Total Pages: 154
Release: 2021-08-16
Genre: Science
ISBN: 1119242010

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PHOTOVOLTAIC MANUFACTURING This book covers the state-of-the-art and the fundamentals of silicon wafer solar cells manufacturing, written by world-class researchers and experts in the field. High quality and economic photovoltaic manufacturing is central to realizing reliable photovoltaic power supplies at reasonable cost. While photovoltaic silicon wafer manufacturing is at a mature, industrial and mass production stage, knowing and applying the fundamentals in solar manufacturing is essential to anyone working in this field. This is the first book on photovoltaic wet processing for silicon wafers, both mono- and multi-crystalline. The comprehensive book provides information for process, equipment, and device engineers and researchers in the solar manufacturing field. The authors of the chapters are world-class researchers and experts in their field of endeavor. The fundamentals of wet processing chemistry are introduced, covering etching, texturing, cleaning and metrology. New developments, innovative approaches, as well as current challenges are presented. Benefits of reading the book include: The book includes a detailed discussion of the important new development of black silicon, which is considered to have started a new wave in photovoltaics and become the new standard while substantially lowering the cost. Photovoltaics are central to any country’s “New Green Deal” and this book shows how to manufacture competitively. The book’s central goal is to show photovoltaic manufacturing can be done with enhanced quality and lowering costs. Audience Engineers, chemists, physicists, process technologists, in both academia and industry, that work with photovoltaics and their manufacture.