Microwave Plasma Sources and Methods in Processing Technology

Microwave Plasma Sources and Methods in Processing Technology
Author: Hana Barankova
Publisher: John Wiley & Sons
Total Pages: 208
Release: 2022-01-31
Genre: Technology & Engineering
ISBN: 1119826896
GET BOOK

Download Microwave Plasma Sources and Methods in Processing Technology Book in PDF, Epub and Kindle

A practical introduction to microwave plasma for processing applications at a variety of pressures In Microwave Plasma Sources and Methods in Processing Technology, the authors deliver a comprehensive introduction to microwaves and microwave-generated plasmas. Ideal for anyone interested in non-thermal gas discharge plasmas and their applications, the book includes detailed descriptions, explanations, and practical guidance for the study and use of microwave power, microwave components, plasma, and plasma generation. This reference includes over 130 full-color diagrams to illustrate the concepts discussed within. The distinguished authors discuss the plasmas generated at different levels of power, as well as their applications at reduced, atmospheric and higher pressures. They also describe plasmas inside liquids and plasma interactions with combustion flames. Microwave Plasma Sources and Methods in Processing Technology concludes with an incisive exploration of new trends in the study and application of microwave discharges, offering promising new areas of study. The book also includes: • A thorough introduction to the basic principles of microwave techniques and power systems, including a history of the technology, microwave generators, waveguides, and wave propagation • A comprehensive exploration of the fundamentals of the physics of gas discharge plasmas, including plasma generation, Townsend coefficients, and the Paschen curve • Practical discussions of the interaction between plasmas and solid surfaces and gases, including PVD, PE CVD, oxidation, sputtering, evaporation, dry etching, surface activation, and cleaning • In-depth examinations of microwave plasma systems for plasma processing at varied parameters Perfect for researchers and engineers in the microwave community, as well as those who work with plasma applications, Microwave Plasma Sources and Methods in Processing Technology will also earn a place in the libraries of graduate and PhD students studying engineering physics, microwave engineering, and plasmas.

Microwave Plasma Sources and Methods in Processing Technology

Microwave Plasma Sources and Methods in Processing Technology
Author: Ladislav Bardos
Publisher: John Wiley & Sons
Total Pages: 212
Release: 2022-02-23
Genre: Technology & Engineering
ISBN: 111982687X
GET BOOK

Download Microwave Plasma Sources and Methods in Processing Technology Book in PDF, Epub and Kindle

A practical introduction to microwave plasma for processing applications at a variety of pressures In Microwave Plasma Sources and Methods in Processing Technology, the authors deliver a comprehensive introduction to microwaves and microwave-generated plasmas. Ideal for anyone interested in non-thermal gas discharge plasmas and their applications, the book includes detailed descriptions, explanations, and practical guidance for the study and use of microwave power, microwave components, plasma, and plasma generation. This reference includes over 130 full-color diagrams to illustrate the concepts discussed within. The distinguished authors discuss the plasmas generated at different levels of power, as well as their applications at reduced, atmospheric and higher pressures. They also describe plasmas inside liquids and plasma interactions with combustion flames. Microwave Plasma Sources and Methods in Processing Technology concludes with an incisive exploration of new trends in the study and application of microwave discharges, offering promising new areas of study. The book also includes: • A thorough introduction to the basic principles of microwave techniques and power systems, including a history of the technology, microwave generators, waveguides, and wave propagation • A comprehensive exploration of the fundamentals of the physics of gas discharge plasmas, including plasma generation, Townsend coefficients, and the Paschen curve • Practical discussions of the interaction between plasmas and solid surfaces and gases, including PVD, PE CVD, oxidation, sputtering, evaporation, dry etching, surface activation, and cleaning • In-depth examinations of microwave plasma systems for plasma processing at varied parameters Perfect for researchers and engineers in the microwave community, as well as those who work with plasma applications, Microwave Plasma Sources and Methods in Processing Technology will also earn a place in the libraries of graduate and PhD students studying engineering physics, microwave engineering, and plasmas.

High Density Plasma Sources

High Density Plasma Sources
Author: Oleg A. Popov
Publisher: Elsevier
Total Pages: 467
Release: 1996-12-31
Genre: Science
ISBN: 0815517890
GET BOOK

Download High Density Plasma Sources Book in PDF, Epub and Kindle

This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin films, sputtered deposition of metals and dielectrics, epitaxial growth of silicon and GaAs, and many other applications. This is a comprehensive survey and a detailed description of most advanced high density plasma sources used in plasma processing. The book is a balanced presentation in that it gives both a theoretical treatment and practical applications. It should be of considerable interest to scientists and engineers working on plasma source design, and process development.

Low Temperature Plasma Technology

Low Temperature Plasma Technology
Author: Paul K. Chu
Publisher: CRC Press
Total Pages: 488
Release: 2013-07-15
Genre: Science
ISBN: 1466509910
GET BOOK

Download Low Temperature Plasma Technology Book in PDF, Epub and Kindle

Written by a team of pioneering scientists from around the world, Low Temperature Plasma Technology: Methods and Applications brings together recent technological advances and research in the rapidly growing field of low temperature plasmas. The book provides a comprehensive overview of related phenomena such as plasma bullets, plasma penetration i

Advanced Technologies Based on Wave and Beam Generated Plasmas

Advanced Technologies Based on Wave and Beam Generated Plasmas
Author: H. Schlüter
Publisher: Springer Science & Business Media
Total Pages: 580
Release: 2013-06-29
Genre: Science
ISBN: 9401706336
GET BOOK

Download Advanced Technologies Based on Wave and Beam Generated Plasmas Book in PDF, Epub and Kindle

This book draws together three areas of work on plasma technologies: advanced efforts based on wave generated, high frequency plasmas, plasma assisted ion implantation, and electron beam generated plasma. It lays a foundation for the application of sources in industry and various research areas

Handbook of Advanced Plasma Processing Techniques

Handbook of Advanced Plasma Processing Techniques
Author: R.J. Shul
Publisher: Springer Science & Business Media
Total Pages: 664
Release: 2011-06-28
Genre: Technology & Engineering
ISBN: 3642569897
GET BOOK

Download Handbook of Advanced Plasma Processing Techniques Book in PDF, Epub and Kindle

Pattern transfer by dry etching and plasma-enhanced chemical vapor de position are two of the cornerstone techniques for modern integrated cir cuit fabrication. The success of these methods has also sparked interest in their application to other techniques, such as surface-micromachined sen sors, read/write heads for data storage and magnetic random access memory (MRAM). The extremely complex chemistry and physics of plasmas and their interactions with the exposed surfaces of semiconductors and other materi als is often overlooked at the manufacturing stage. In this case, the process is optimized by an informed "trial-and-error" approach which relies heavily on design-of-experiment techniques and the intuition of the process engineer. The need for regular cleaning of plasma reactors to remove built-up reaction or precursor gas products adds an extra degree of complexity because the interaction of the reactive species in the plasma with the reactor walls can also have a strong effect on the number of these species available for etching or deposition. Since the microelectronics industry depends on having high process yields at each step of the fabrication process, it is imperative that a full understanding of plasma etching and deposition techniques be achieved.

Plasma Processing of Materials

Plasma Processing of Materials
Author: National Research Council
Publisher: National Academies Press
Total Pages: 88
Release: 1991-02-01
Genre: Technology & Engineering
ISBN: 0309045975
GET BOOK

Download Plasma Processing of Materials Book in PDF, Epub and Kindle

Plasma processing of materials is a critical technology to several of the largest manufacturing industries in the worldâ€"electronics, aerospace, automotive, steel, biomedical, and toxic waste management. This book describes the relationship between plasma processes and the many industrial applications, examines in detail plasma processing in the electronics industry, highlights the scientific foundation underlying this technology, and discusses education issues in this multidisciplinary field. The committee recommends a coordinated, focused, and well-funded research program in this area that involves the university, federal laboratory, and industrial sectors of the community. It also points out that because plasma processing is an integral part of the infrastructure of so many American industries, it is important for both the economy and the national security that America maintain a strong leadership role in this technology.

Advanced Concepts and Architectures for Plasma-Enabled Material Processing

Advanced Concepts and Architectures for Plasma-Enabled Material Processing
Author: Oleg O. Baranov
Publisher: Springer Nature
Total Pages: 82
Release: 2022-05-31
Genre: Technology & Engineering
ISBN: 3031020359
GET BOOK

Download Advanced Concepts and Architectures for Plasma-Enabled Material Processing Book in PDF, Epub and Kindle

Plasma-based techniques are widely and successfully used across the field of materials processing, advanced nanosynthesis, and nanofabrication. The diversity of currently available processing architectures based on or enhanced by the use of plasmas is vast, and one can easily get lost in the opportunities presented by each of these configurations. This mini-book provides a concise outline of the most important concepts and architectures in plasma-assisted processing of materials, helping the reader navigate through the fundamentals of plasma system selection and optimization. Architectures discussed in this book range from the relatively simple, user-friendly types of plasmas produced using direct current, radio-frequency, microwave, and arc systems, to more sophisticated advanced systems based on incorporating and external substrate architectures, and complex control mechanisms of configured magnetic fields and distributed plasma sources.