Microfabricated Ice-Detection Sensor

Microfabricated Ice-Detection Sensor
Author:
Publisher:
Total Pages: 16
Release: 1997
Genre:
ISBN:

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Knowledge of ice conditions on important aircraft lift and control surfaces is critical for safe operation. These conditions can be determined with conventional ice detection sensors, but these sensors are often expensive, require elaborate installation procedures, and interrupt the airflow. A micromachined, silicon based, flush mounted sensor which generates no internal heat has been designed, batch fabricated, packaged, and tested. The sensor is capable of distinguishing between an ice covered and a clean surface. It employs a bulk micromachined wafer with a 7 micrometers thick, boron doped, silicon diaphragm which serves as one plate of a parallel plate capacitor. This is bonded to a second silicon wafer which contains the fixed electrodes; one to drive the diaphragm by application of a voltage, the other to measure the deflection by a change in capacitance. The diaphragm sizes ranged from 1x1mm to 3x3mm, and the gap between parallel plate capacitors is 2 micrometers. A 200V d.c. was applied to the driving electrode which caused the capacitance to increase approximately 0.6pf from a nominal capacitance of 0.6pf when the surface was ice free. After the sensor was cooled below the freezing point of water, the same voltage range was applied to the drive electrode. The capacitance increased by the same amount. Then a drop of water was placed over the diaphragm and allowed to freeze. This created an approximately 2mm thick ice layer. The applied 200V d.c. produced no change in capacitance, confirming that the diaphragm was locked to the ice layer. Since the sensor uses capacitive actuation, it uses very little power and is an ideal candidate for inclusion in a wireless sensing system.

Microfabricated Systems and MEMS VII

Microfabricated Systems and MEMS VII
Author:
Publisher: The Electrochemical Society
Total Pages: 352
Release: 2004
Genre: Microelectromechanical systems
ISBN: 9781566774222

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Microfabricated Systems and MEMS VI

Microfabricated Systems and MEMS VI
Author: Peter J. Hesketh
Publisher: The Electrochemical Society
Total Pages: 268
Release: 2002
Genre: Microelectromechanical systems
ISBN: 9781566773720

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Microfabricated Systems and MEMS V

Microfabricated Systems and MEMS V
Author:
Publisher: The Electrochemical Society
Total Pages: 278
Release: 2000
Genre: Technology & Engineering
ISBN: 9781566772860

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Sensors, Micro- and Nanosensor Technology

Sensors, Micro- and Nanosensor Technology
Author: Wolfgang Göpel
Publisher: John Wiley & Sons
Total Pages: 579
Release: 2008-07-11
Genre: Technology & Engineering
ISBN: 3527620613

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Sensors is the first self-contained series to deal with the whole area of sensors. It describes general aspects, technical and physical fundamentals, construction, function, applications and developments of the various types of sensors. This final volume of the series uncovers trends in sensor technology and gives a comprehensive overview of the sensor market. The use of sensors in microsystems and in vacuum microelectronic as well as in acoustic wave devices is discussed. Present and emerging applications of sensors in aerospace, environmental, automotive, and medical industries, among others, are described. This volume is an indispensable reference work for both specialists and newcomers, researchers and developers

Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators

Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators
Author: Evgeni Gusev
Publisher: Springer Science & Business Media
Total Pages: 310
Release: 2010-03-15
Genre: Technology & Engineering
ISBN: 9048138051

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A NATO Advanced Research Workshop (ARW) entitled “Advanced Materials and Technologies for Micro/Nano Devices, Sensors and Actuators” was held in St. Petersburg, Russia, from June 29 to July 2, 2009. The main goal of the Workshop was to examine (at a fundamental level) the very complex scientific issues that pertain to the use of micro- and nano-electromechanical systems (MEMS and NEMS), devices and technologies in next generation commercial and defen- related applications. Micro- and nano-electromechanical systems represent rather broad and diverse technological areas, such as optical systems (micromirrors, waveguides, optical sensors, integrated subsystems), life sciences and lab equipment (micropumps, membranes, lab-on-chip, membranes, microfluidics), sensors (bio-sensors, chemical sensors, gas-phase sensors, sensors integrated with electronics) and RF applications for signal transmission (variable capacitors, tunable filters and antennas, switches, resonators). From a scientific viewpoint, this is a very multi-disciplinary field, including micro- and nano-mechanics (such as stresses in structural materials), electronic effects (e. g. charge transfer), general electrostatics, materials science, surface chemistry, interface science, (nano)tribology, and optics. It is obvious that in order to overcome the problems surrounding next-generation MEMS/NEMS devices and applications it is necessary to tackle them from different angles: theoreticians need to speak with mechanical engineers, and device engineers and modelers to listen to surface physicists. It was therefore one of the main objectives of the workshop to bring together a multidisciplinary team of distinguished researchers.

Micro Mechanical Systems

Micro Mechanical Systems
Author: T. Fukuda
Publisher: Elsevier
Total Pages: 278
Release: 1998-07-24
Genre: Technology & Engineering
ISBN: 0080536549

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In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four discusses tribological aspects of microsystems. Section five covers fabrication, performance and examples of silicon microsensors. Section six looks at electric and magnetic micro-actuators for micro-robots. Section seven covers energy source and power supply methods. Section eight covers controlling principles and methods of micro mechanical systems and section nine gives examples of microsystems and micromachines. The final section discusses the future problems and outlook of micro mechanical systems.