Investigations Into the Origins of the Physical Structure of Thin Films
Author | : Russell Messier |
Publisher | : |
Total Pages | : 42 |
Release | : 1985 |
Genre | : |
ISBN | : |
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Thin film morphology often plays a critical role in the large variation in film properties with varying film preparation conditions. The research being carried out under this grant has been directed toward establishing a quantitative link between preparation property relations. A central part of this work has been to develop a fractal model of the general cauliflower like morphology that pervades films prepared under low adatom mobility conditions. The general approach has been to attack this problem from a number of different angles. Keywords: Thin films; Sputtering; Ion assisted deposition; Morphology, Random aggregation; Fractals; Morphology evolution.