Wavefront Metrology for High Resolution Optical Systems

Wavefront Metrology for High Resolution Optical Systems
Author: Ryan Miyakawa
Publisher:
Total Pages: 252
Release: 2011
Genre:
ISBN:

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Next generation extreme ultraviolet (EUV) optical systems are moving to higher resolution optics to accommodate smaller length scales targeted by the semiconductor industry. As the numerical apertures (NA) of the optics become larger, it becomes increasingly difficult to characterize aberrations due to experimental challenges associated with high-resolution spatial filters and geometrical effects caused by large incident angles of the test wavefront. This dissertation focuses on two methods of wavefront metrology for high resolution optical systems. The first method, lateral shearing interferometry (LSI), is a self-referencing interferometry where the test wavefront is incident on a low spatial frequency grating, and the resulting interference between the diffracted orders is used to reconstruct the wavefront aberrations. LSI has many advantages over other interferometric tests such as phase-shifting point diffraction interferometry (PS/PDI) due to its experimental simplicity, stability, relaxed coherence requirements, and its ability to scale to high numerical apertures. While LSI has historically been a qualitative test, this dissertation presents a novel quantitative investigation of the LSI interferogram. The analysis reveals the existence of systematic aberrations due to the nonlinear angular response from the diffraction grating that compromises the accuracy of LSI at medium to high NAs. In the medium NA regime (0.15

Building Electro-Optical Systems

Building Electro-Optical Systems
Author: Philip C. D. Hobbs
Publisher: John Wiley & Sons
Total Pages: 750
Release: 2011-09-20
Genre: Technology & Engineering
ISBN: 111821109X

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Praise for the First Edition "Now a new laboratory bible for optics researchers has joined the list: it is Phil Hobbs's Building Electro-Optical Systems: Making It All Work." —Tony Siegman, Optics & Photonics News Building a modern electro-optical instrument may be the most interdisciplinary job in all of engineering. Be it a DVD player or a laboratory one-off, it involves physics, electrical engineering, optical engineering, and computer science interacting in complex ways. This book will help all kinds of technical people sort through the complexity and build electro-optical systems that just work, with maximum insight and minimum trial and error. Written in an engaging and conversational style, this Second Edition has been updated and expanded over the previous edition to reflect technical advances and a great many conversations with working designers. Key features of this new edition include: Expanded coverage of detectors, lasers, photon budgets, signal processing scheme planning, and front ends Coverage of everything from basic theory and measurement principles to design debugging and integration of optical and electronic systems Supplementary material is available on an ftp site, including an additional chapter on thermal Control and Chapter problems highly relevant to real-world design Extensive coverage of high performance optical detection and laser noise cancellation Each chapter is full of useful lore from the author's years of experience building advanced instruments. For more background, an appendix lists 100 good books in all relevant areas, introductory as well as advanced. Building Electro-Optical Systems: Making It All Work, Second Edition is essential reading for researchers, students, and professionals who have systems to build.

Optical Metrology

Optical Metrology
Author: Olivério D.D. Soares
Publisher: Springer Science & Business Media
Total Pages: 794
Release: 2012-12-06
Genre: Science
ISBN: 9400936095

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Optical Metrology is a rapidly expanding field i'n both its scientific foundations and technological developments, being of major concern to measurements, quality control, non-destructive tes ting and in fundamental research. In order to define the state-of-the-art, and to evaluate pre sent accomplishments, whilst giving an appraisal of how each of the particular topics will evolve the Optical Metrology-anAdvancedStudy Institute was organized with a concourse of the world's acknowledged experts. Thus, the Institute provided a forum for tutorial reviews blended with topics of current research in the form of a progressive and comprehensive presentation of recent promising developments, lea ding techniques and instrumentation in incoherent and coherent optics for Metrology, Sensing and Control in Science, Industry and Biomedici ne. Optical Metrology is a very broad field which is highly inter disciplinary in its applications, and in its scientific and technolo gical background. It is related to such diverse disciplines as physi cal and chemical sciences, engineering, electronics, computer scien ces, biological sciences and theoretical sciences, such as statistics. Although there was an emphasis on photomechanics and industri al applications, a marked diversity was reflected in the different background and interests of the participants. The vitality and viabi lity of the discipline was enhanced not only by the encouraging number of young scientists and industrialists participating and authoring, but also by the remarkably promising prospects found in x the practical applications supported by advanced electronic hybridi zation.

Diffractive Optics and Nanophotonics

Diffractive Optics and Nanophotonics
Author: Igor Minin
Publisher: Springer
Total Pages: 76
Release: 2015-10-29
Genre: Science
ISBN: 3319242539

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In this book the authors present several examples of techniques used to overcome the Abby diffraction limit using flat and 3D diffractive optical elements, photonic crystal lenses, photonic jets, and surface plasmon diffractive optics. The structures discussed can be used in the microwave and THz range and also as scaled models for optical frequencies. Such nano-optical microlenses can be integrated, for example, into existing semiconductor heterostructure platforms for next-generation optoelectronic applications. Chapter 1 considers flat diffractive lenses and innovative 3D radiating structures including a conical millimeter-wave Fresnel zone plate (FZP) lens proposed for subwavelength focusing. In chapter 2 the subwavelength focusing properties of diffractive photonic crystal lenses are considered and it is shown that at least three different types of photonic crystal lens are possible. With the aim of achieving subwavelength focusing, in chapter 3 an alternative mechanism to produce photonic jets at Terahertz frequencies (terajets) using 3D dielectric particles of arbitrary size (cuboids) is considered. A scheme to create a 2D “teraknife” using dielectric rods is also discussed. In the final chapter the successful adaptation of free-space 3D binary phase-reversal conical FZPs for operation on surface plasmon-polariton (SPP) waves demonstrates that analogues of Fourier diffractive components can be developed for in-plane SPP 3D optics. Review ing theory, modelling and experiment, this book will be a valuable resource for students and researchers working on nanophotonics and sub-wavelength focusing and imaging.

Optical Coherence Tomography

Optical Coherence Tomography
Author: Wolfgang Drexler
Publisher: Springer Science & Business Media
Total Pages: 1346
Release: 2008-12-10
Genre: Medical
ISBN: 3540775501

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Optical coherence tomography (OCT) is the optical analog of ultrasound imaging and is emerging as a powerful imaging technique that enables non-invasive, in vivo, high resolution, cross-sectional imaging in biological tissue. This book introduces OCT technology and applications not only from an optical and technological viewpoint, but also from biomedical and clinical perspectives. The chapters are written by leading research groups, in a style comprehensible to a broad audience.

Seismic Diffraction

Seismic Diffraction
Author: Tijmen Jan Moser
Publisher: SEG Books
Total Pages: 823
Release: 2016-06-30
Genre: Science
ISBN: 1560803177

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The use of diffraction imaging to complement the seismic reflection method is rapidly gaining momentum in the oil and gas industry. As the industry moves toward exploiting smaller and more complex conventional reservoirs and extensive new unconventional resource plays, the application of the seismic diffraction method to image sub-wavelength features such as small-scale faults, fractures and stratigraphic pinchouts is expected to increase dramatically over the next few years. “Seismic Diffraction” covers seismic diffraction theory, modeling, observation, and imaging. Papers and discussion include an overview of seismic diffractions, including classic papers which introduced the potential of diffraction phenomena in seismic processing; papers on the forward modeling of seismic diffractions, with an emphasis on the theoretical principles; papers which describe techniques for diffraction mathematical modeling as well as laboratory experiments for the physical modeling of diffractions; key papers dealing with the observation of seismic diffractions, in near-surface-, reservoir-, as well as crustal studies; and key papers on diffraction imaging.

High Resolution Imaging in Microscopy and Ophthalmology

High Resolution Imaging in Microscopy and Ophthalmology
Author: Josef F. Bille
Publisher: Springer
Total Pages: 407
Release: 2019-08-13
Genre: Medical
ISBN: 3030166384

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This open access book provides a comprehensive overview of the application of the newest laser and microscope/ophthalmoscope technology in the field of high resolution imaging in microscopy and ophthalmology. Starting by describing High-Resolution 3D Light Microscopy with STED and RESOLFT, the book goes on to cover retinal and anterior segment imaging and image-guided treatment and also discusses the development of adaptive optics in vision science and ophthalmology. Using an interdisciplinary approach, the reader will learn about the latest developments and most up to date technology in the field and how these translate to a medical setting. High Resolution Imaging in Microscopy and Ophthalmology – New Frontiers in Biomedical Optics has been written by leading experts in the field and offers insights on engineering, biology, and medicine, thus being a valuable addition for scientists, engineers, and clinicians with technical and medical interest who would like to understand the equipment, the applications and the medical/biological background. Lastly, this book is dedicated to the memory of Dr. Gerhard Zinser, co-founder of Heidelberg Engineering GmbH, a scientist, a husband, a brother, a colleague, and a friend.

The Infrared Handbook

The Infrared Handbook
Author: Environmental Research Institute of Michigan. Infrared Information and Analysis Center
Publisher:
Total Pages: 1740
Release: 1978
Genre: Infrared radiation
ISBN:

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