High Resolution Optical Surface Metrology with the Slope Measuring Portable Optical Test System

High Resolution Optical Surface Metrology with the Slope Measuring Portable Optical Test System
Author: Alejandro V. Maldonado
Publisher:
Total Pages: 165
Release: 2014
Genre:
ISBN:

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New optical designs strive to achieve extreme performance, and continually increase the complexity of prescribed optical shapes, which often require wide dynamic range and high resolution. SCOTS, or the Software Configurable Optical Test System, can measure a wide range of optical surfaces with high sensitivity using surface slope. This dissertation introduces a high resolution version of SCOTS called SPOTS, or the Slope measuring Portable Optical Test System. SPOTS improves the metrology of surface features on the order of sub-millimeter to decimeter spatial scales and nanometer to micrometer level height scales. Currently there is no optical surface metrology instrument with the same utility. SCOTS uses a computer controlled display (such as an LCD monitor) and camera to measure surface slopes over the entire surface of a mirror. SPOTS differs in that an additional lens is placed near the surface under test. A small prototype system is discussed in general, providing the support for the design of future SPOTS devices. Then the SCOTS instrument transfer function is addressed, which defines the way the system filters surface heights. Lastly, the calibration and performance of larger SPOTS device is analyzed with example measurements of the 8.4-m diameter aspheric Large Synoptic Survey Telescope's (LSST) primary mirror. In general optical systems have a transfer function, which filters data. In the case of optical imaging systems the instrument transfer function (ITF) follows the modulation transfer function (MTF), which causes a reduction of contrast as a function of increasing spatial frequency due to diffraction. In SCOTS, ITF is shown to decrease the measured height of surface features as their spatial frequency increases, and thus the SCOTS and SPOTS ITF is proportional to their camera system's MTF. Theory and simulations are supported by a SCOTS measurement of a test piece with a set of lithographically written sinusoidal surface topographies. In addition, an example of a simple inverse filtering technique is provided. The success of a small SPOTS proof of concept instrument paved the way for a new larger prototype system, which is intended to measure subaperture regions on large optical mirrors. On large optics, the prototype SPOTS is light weight and it rests on the surface being tested. One advantage of this SPOTS is stability over time in maintaining its calibration. Thus the optician can simply place SPOTS on the mirror, perform a simple alignment, collect measurement data, then pick the system up and repeat at a new location. The entire process takes approximately 5 to 10 minutes, of which 3 minutes is spent collecting data. SPOTS' simplicity of design, light weight, robustness, wide dynamic range, and high sensitivity make it a useful tool for optical shop use during the fabrication and testing process of large and small optics.

Optical Measurement of Surface Topography

Optical Measurement of Surface Topography
Author: Richard Leach
Publisher: Springer Science & Business Media
Total Pages: 333
Release: 2011-03-31
Genre: Technology & Engineering
ISBN: 3642120121

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The measurement and characterisation of surface topography is crucial to modern manufacturing industry. The control of areal surface structure allows a manufacturer to radically alter the functionality of a part. Examples include structuring to effect fluidics, optics, tribology, aerodynamics and biology. To control such manufacturing methods requires measurement strategies. There is now a large range of new optical techniques on the market, or being developed in academia, that can measure areal surface topography. Each method has its strong points and limitations. The book starts with introductory chapters on optical instruments, their common language, generic features and limitations, and their calibration. Each type of modern optical instrument is described (in a common format) by an expert in the field. The book is intended for both industrial and academic scientists and engineers, and will be useful for undergraduate and postgraduate studies.

Metrics for High-quality Specular Surfaces

Metrics for High-quality Specular Surfaces
Author: Lionel R. Baker
Publisher: SPIE Press
Total Pages: 170
Release: 2004
Genre: Technology & Engineering
ISBN: 9780819455765

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This book supplies the optical component and systems designer, and quality assurance engineers and managers with the definitions, measurement principles, and standard metrics used to characterize high-quality specular surfaces. The author covers both the traditional visual methods as well as newer (but not necessarily better) computer-aided techniques and describes the metrics adopted by the new ISO standards, including the setting of form and finish tolerances. Key issues of industry are raised, to help stimulate research and development of new methods and standards that blend the best of the old and new approaches to surface assessment.

A Practical Guide to Surface Metrology

A Practical Guide to Surface Metrology
Author: Michael Quinten
Publisher: Springer Nature
Total Pages: 247
Release: 2020-01-01
Genre: Technology & Engineering
ISBN: 3030294544

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This book offers a genuinely practical introduction to the most commonly encountered optical and non-optical systems used for the metrology and characterization of surfaces, including guidance on best practice, calibration, advantages and disadvantages, and interpretation of results. It enables the user to select the best approach in a given context. Most methods in surface metrology are based upon the interaction of light or electromagnetic radiation (UV, NIR, IR), and different optical effects are utilized to get a certain optical response from the surface; some of them record only the intensity reflected or scattered by the surface, others use interference of EM waves to obtain a characteristic response from the surface. The book covers techniques ranging from microscopy (including confocal, SNOM and digital holographic microscopy) through interferometry (including white light, multi-wavelength, grazing incidence and shearing) to spectral reflectometry and ellipsometry. The non-optical methods comprise tactile methods (stylus tip, AFM) as well as capacitive and inductive methods (capacitive sensors, eddy current sensors). The book provides: Overview of the working principles Description of advantages and disadvantages Currently achievable numbers for resolutions, repeatability, and reproducibility Examples of real-world applications A final chapter discusses examples where the combination of different surface metrology techniques in a multi-sensor system can reasonably contribute to a better understanding of surface properties as well as a faster characterization of surfaces in industrial applications. The book is aimed at scientists and engineers who use such methods for the measurement and characterization of surfaces across a wide range of fields and industries, including electronics, energy, automotive and medical engineering.

Asphercial Metrology for Non-Specular Surfaces with the Scanning Long-Wave Optical Test System

Asphercial Metrology for Non-Specular Surfaces with the Scanning Long-Wave Optical Test System
Author: Tianquan Su
Publisher:
Total Pages: 137
Release: 2014
Genre:
ISBN:

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Aspherical optics are increasingly used these days. The application of aspherical surfaces on large, astronomical telescope mirrors brings challenge to the fabrication. Since the surface radius of curvature varies across the surface, the grinding/polishing tool needs to change its shape when working on different parts of the surface, making surface error more easily embedded into the surface. Therefore, a tighter test-fab loop is needed to guide the fabrication process. To maximize the accuracy during the grinding of the surface and to minimize the working time in the polishing stage, a better metrology device that can measure rough surface is needed to guide the grinding process. Scanning long-wave optical test system (SLOTS) is designed to meet this demand by providing accurate, fast, large dynamic range, and high spatial resolution measurements on rough optical surfaces (surface rms roughness

Handbook of Optical Dimensional Metrology

Handbook of Optical Dimensional Metrology
Author: Kevin Harding
Publisher: CRC Press
Total Pages: 509
Release: 2013-02-26
Genre: Technology & Engineering
ISBN: 1439854815

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Due to their speed, data density, and versatility, optical metrology tools play important roles in today’s high-speed industrial manufacturing applications. Handbook of Optical Dimensional Metrology provides useful background information and practical examples to help readers understand and effectively use state-of-the-art optical metrology methods. The book first builds a foundation for evaluating optical measurement methods. It explores the many terms of optical metrology and compares it to other forms of metrology, such as mechanical gaging, highlighting the limitations and errors associated with each mode of measurement at a general level. This comparison is particularly helpful to current industry users who operate the most widely applied mechanical tools. The book then focuses on each application area of measurement, working down from large area to medium-sized to submicron measurements. It describes the measurement of large objects on the scale of buildings, the measurement of durable manufactured goods such as aircraft engines and appliances, and the measurement of fine features on the micron and nanometer scales. In each area, the book covers fast, coarse measures as well as the finest measurements possible. Best practices and practical examples for each technology aid readers in effectively using the methods. Requiring no prior expertise in optical dimensional metrology, this handbook helps engineers and quality specialists understand the capabilities and limitations of optical metrology methods. It also shows them how to successfully apply optical metrology to a vast array of current engineering and scientific problems.

Fringe 2009

Fringe 2009
Author: Wolfgang Osten
Publisher: Springer Science & Business Media
Total Pages: 808
Release: 2010-04-28
Genre: Technology & Engineering
ISBN: 3642030513

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21 years ago it was a joint idea with Hans Rottenkolber to organize a workshop dedicated to the discussion of the latest results in the automatic processing of fringe patterns. This idea was promoted by the insight that automatic and high precision phase measurement techniques will play a key role in all future industrial and scientific applications of optical metrology. A couple of months later more than 50 specialists from East and West met in East Berlin, the capital of the former GDR, to spend 3 days with the discussion of new principles of fringe processing. In the stimulating atmoshere the idea was born to repeat the workshop and to organize the meeting in an olympic schedule. And thus meanwhile 20 years have been passed and we have today Fringe number six. However, such a workshop takes place in a dynamic environment. Therefore the main topics of the previous events were always adapted to the most interesting subjects of the new period. In 1993 the workshop took place in Bremen and was dedicated to new principles of optical shape measurement, setup calibration, phase unwrapping and nondestructive testing, while in 1997 new approaches in multi-sensor metrology, active measurement strategies and hybrid processing technologies played a central role. 2001, the first meeting in the 21st century, was focused to optical methods for micromeasurements, hybrid measurement technologies and new sensor solutions for industrial inspection.

Optical Metrology for Fluids, Combustion and Solids

Optical Metrology for Fluids, Combustion and Solids
Author: Carolyn Mercer
Publisher: Springer Science & Business Media
Total Pages: 490
Release: 2003-07-31
Genre: Technology & Engineering
ISBN: 9781402074073

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Optical Metrology for Fluids, Combustion and Solids is the first practical handbook that presents the assemblage of the techniques necessary to provide a basic understanding of optical measurement for fluids, combustion, and solids. The use of light as a measurement tool has grown over the past twenty years from a narrowly specialized activity to a mainstay of modern research today. Until recently, the knowledge that could be extracted from the light interaction of light with physical objects was limited to specialized activities. The invention of the laser, the computer and microelectronics has enabled a measurement revolution such that virtually every parameter of engineering interest can be measured using the minimally intrusive properties of light. The authors of this book's chapters are leaders in this revolution. They work on the front lines of research in government, industry, and universities, inventing yet more ways to harness the power of light for the generation of knowledge.

Optical Metrology for Precision Engineering

Optical Metrology for Precision Engineering
Author: Wei Gao
Publisher: Walter de Gruyter GmbH & Co KG
Total Pages: 655
Release: 2021-11-22
Genre: Technology & Engineering
ISBN: 3110542366

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This book provides readers the fundamentals of optical metrology for precision engineering. The next-generation measurement technologies based on ultrashort pulse laser and optical frequency comb are also presented, making it an essential reference book for various engineering fields. • Introduces fundamental theories and techniques • Combines theories with practical applications • Presents technologies in an easy-to-understand way