Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography

Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography
Author: P. Rai-Choudhury
Publisher: SPIE Press
Total Pages: 780
Release: 1997
Genre: Technology & Engineering
ISBN: 9780819423788

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The dynamic field of lithography demands an authoritative handbook for process development and production, and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook. Copublished with IEE.

Handbook of Microlithography, Micromachining, and Microfabrication

Handbook of Microlithography, Micromachining, and Microfabrication
Author: Prosenjit Rai-Choudhury
Publisher:
Total Pages: 776
Release: 1997-03-30
Genre:
ISBN: 9780819497864

Download Handbook of Microlithography, Micromachining, and Microfabrication Book in PDF, Epub and Kindle

The dynamic field of lithography demands an authoritative handbook for process development and production, and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook.

Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography

Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography
Author: P. Rai-Choudhury
Publisher: IET
Total Pages: 784
Release: 1997
Genre: Technology & Engineering
ISBN: 9780852969069

Download Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography Book in PDF, Epub and Kindle

Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affecting the integrated circuit industry. New applications in such areas as sensors, actuators and biomedical devices, are described.