Handbook Of Chemical Vapor Deposition
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Author | : Hugh O. Pierson |
Publisher | : William Andrew |
Total Pages | : 507 |
Release | : 1999-09-01 |
Genre | : Technology & Engineering |
ISBN | : 0815517432 |
Download Handbook of Chemical Vapor Deposition Book in PDF, Epub and Kindle
Turn to this new second edition for an understanding of the latest advances in the chemical vapor deposition (CVD) process. CVD technology has recently grown at a rapid rate, and the number and scope of its applications and their impact on the market have increased considerably. The market is now estimated to be at least double that of a mere seven years ago when the first edition of this book was published. The second edition is an update with a considerably expanded and revised scope. Plasma CVD and metallo-organic CVD are two major factors in this rapid growth. Readers will find the latest data on both processes in this volume. Likewise, the book explains the growing importance of CVD in production of semiconductor and related applications.
Author | : |
Publisher | : |
Total Pages | : |
Release | : 2018 |
Genre | : |
ISBN | : 9781785693168 |
Download HANDBOOK OF CHEMICAL VAPOR DEPOSITION (2 VOLUMES). Book in PDF, Epub and Kindle
Author | : Hugh O. Pierson |
Publisher | : William Andrew |
Total Pages | : 458 |
Release | : 2012-12-02 |
Genre | : Technology & Engineering |
ISBN | : 1437744885 |
Download Handbook of Chemical Vapor Deposition Book in PDF, Epub and Kindle
Handbook of Chemical Vapor Deposition: Principles, Technology and Applications provides information pertinent to the fundamental aspects of chemical vapor deposition. This book discusses the applications of chemical vapor deposition, which is a relatively flexible technology that can accommodate many variations. Organized into 12 chapters, this book begins with an overview of the theoretical examination of the chemical vapor deposition process. This text then describes the major chemical reactions and reviews the chemical vapor deposition systems and equipment used in research and production. Other chapters consider the materials deposited by chemical vapor deposition. This book discusses as well the potential applications of chemical vapor deposition in semiconductors and electronics. The final chapter deals with ion implantation as a major process in the fabrication of semiconductors. This book is a valuable resource for scientists, engineers, and students. Production and marketing managers and suppliers of equipment, materials, and services will also find this book useful.
Author | : Hugh O. Pierson |
Publisher | : Noyes Publications |
Total Pages | : 482 |
Release | : 1999-01-01 |
Genre | : Technology & Engineering |
ISBN | : 9780815514329 |
Download Handbook of Chemical Vapor Depostion [i.e. Deposition] (CVD) Book in PDF, Epub and Kindle
Since the publication of the first edition of the Handbook of Chemical Vapor Deposition (CVD) in early 1992, the technology has developed at a rapid rate and the number and scope of its applications and their impact of the market have increased considerably. This process is now a key factor in many industries such as semiconductors, optoelectronics, optics, cutting tools, refractory fibers, filters and many others. The size of the CVD market today (1999) is estimated to be at least double that of the market seven years ago. This second edition of the Handbook is an update with a considerably expanded and revised scope.
Author | : D. M. Mattox |
Publisher | : Cambridge University Press |
Total Pages | : 947 |
Release | : 2014-09-19 |
Genre | : Technology & Engineering |
ISBN | : 0080946585 |
Download Handbook of Physical Vapor Deposition (PVD) Processing Book in PDF, Epub and Kindle
This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that are critical to economical deposition of films that can meet the required performance specifications. The book covers subjects seldom treated in the literature: substrate characterization, adhesion, cleaning and the processing. The book also covers the widely discussed subjects of vacuum technology and the fundamentals of individual deposition processes. However, the author uniquely relates these topics to the practical issues that arise in PVD processing, such as contamination control and film growth effects, which are also rarely discussed in the literature. In bringing these subjects together in one book, the reader can understand the interrelationship between various aspects of the film deposition processing and the resulting film properties. The author draws upon his long experience with developing PVD processes and troubleshooting the processes in the manufacturing environment, to provide useful hints for not only avoiding problems, but also for solving problems when they arise. He uses actual experiences, called ""war stories"", to emphasize certain points. Special formatting of the text allows a reader who is already knowledgeable in the subject to scan through a section and find discussions that are of particular interest. The author has tried to make the subject index as useful as possible so that the reader can rapidly go to sections of particular interest. Extensive references allow the reader to pursue subjects in greater detail if desired. The book is intended to be both an introduction for those who are new to the field and a valuable resource to those already in the field. The discussion of transferring technology between R&D and manufacturing provided in Appendix 1, will be of special interest to the manager or engineer responsible for moving a PVD product and process from R&D into production. Appendix 2 has an extensive listing of periodical publications and professional societies that relate to PVD processing. The extensive Glossary of Terms and Acronyms provided in Appendix 3 will be of particular use to students and to those not fully conversant with the terminology of PVD processing or with the English language.
Author | : Jeffrey B. Fortin |
Publisher | : Springer Science & Business Media |
Total Pages | : 112 |
Release | : 2013-03-09 |
Genre | : Science |
ISBN | : 147573901X |
Download Chemical Vapor Deposition Polymerization Book in PDF, Epub and Kindle
Chemical Vapor Deposition Polymerization - The Growth and Properties of Parylene Thin Films is intended to be valuable to both users and researchers of parylene thin films. It should be particularly useful for those setting up and characterizing their first research deposition system. It provides a good picture of the deposition process and equipment, as well as information on system-to-system variations that is important to consider when designing a deposition system or making modifications to an existing one. Also included are methods to characterizae a deposition system's pumping properties as well as monitor the deposition process via mass spectrometry. There are many references that will lead the reader to further information on the topic being discussed. This text should serve as a useful reference source and handbook for scientists and engineers interested in depositing high quality parylene thin films.
Author | : Anthony C. Jones |
Publisher | : Royal Society of Chemistry |
Total Pages | : 600 |
Release | : 2009 |
Genre | : Science |
ISBN | : 0854044655 |
Download Chemical Vapour Deposition Book in PDF, Epub and Kindle
"The book is one of the most comprehensive overviews ever written on the key aspects of chemical vapour deposition processes and it is more comprehensive, technically detailed and up-to-date than other books on CVD. The contributing authors are all practising CVD technologists and are leading international experts in the field of CVD. It presents a logical and progressive overview of the various aspects of CVD processes. Basic concepts, such as the various types of CVD processes, the design of CVD reactors, reaction modelling and CVD precursor chemistry are covered in the first few"--Jacket
Author | : Dimitra Vernardou |
Publisher | : MDPI |
Total Pages | : 94 |
Release | : 2021-01-15 |
Genre | : Science |
ISBN | : 3039439235 |
Download Advances in Chemical Vapor Deposition Book in PDF, Epub and Kindle
Pursuing a scalable production methodology for materials and advancing it from the laboratory to industry is beneficial to novel daily-life applications. From this perspective, chemical vapor deposition (CVD) offers a compromise between efficiency, controllability, tunability and excellent run-to-run repeatability in the coverage of monolayers on substrates. Hence, CVD meets all of the requirements for industrialization in basically all areas, including polymer coatings, metals, water-filtration systems, solar cells and so on. The Special Issue “Advances in Chemical Vapor Deposition” is dedicated to providing an overview of the latest experimental findings and identifying the growth parameters and characteristics of perovskites, TiO2, Al2O3, VO2 and V2O5 with desired qualities for potentially useful devices.
Author | : Krishna Seshan |
Publisher | : William Andrew |
Total Pages | : 472 |
Release | : 2018-02-23 |
Genre | : Technology & Engineering |
ISBN | : 0128123125 |
Download Handbook of Thin Film Deposition Book in PDF, Epub and Kindle
Handbook of Thin Film Deposition, Fourth Edition, is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, materials for memory applications and methods for thin film optical processes. The book is broken up into three sections: scaling, equipment and processing, and applications. In this newly revised edition, the handbook will also explore the limits of thin film applications, most notably as they relate to applications in manufacturing, materials, design and reliability. Offers a practical survey of thin film technologies aimed at engineers and managers involved in all stages of the process: design, fabrication, quality assurance, applications and the limitations faced by those processes Covers core processes and applications in the semiconductor industry and new developments within the photovoltaic and optical thin film industries Features a new chapter discussing Gates Dielectrics
Author | : Edited by Jong-Hee Park and T.S. Sudarshan |
Publisher | : ASM International |
Total Pages | : 478 |
Release | : 2000-05-01 |
Genre | : Technology & Engineering |
ISBN | : |
Download Surface Engineering Series Volume 2: Chemical Vapor Deposition Book in PDF, Epub and Kindle
This handbook provides guidelines and practical information on the chemical vapor deposition (CVD) process for surface engineering design, product development, and manufacturing. The first of the 14 chapters discuss the basic principles of CVD thermodynamics and kinetics, stresses and mechanical sta