Opto-mechanical Analysis of a Harsh Environment MEMS Fabry-Perot Pressure Sensor

Opto-mechanical Analysis of a Harsh Environment MEMS Fabry-Perot Pressure Sensor
Author: Eric J. Brace
Publisher:
Total Pages: 113
Release: 2019
Genre: Environmental monitoring
ISBN:

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The objective of this thesis is to develop an optically interrogated pressure sensor that is capable of measuring the applied fluid pressure in harsh environments. In its completed state, this sensor is intended be used in plastic injection moulding manufacturing in order to identify the current state of the plastic melt and optimize the process. An extrinsic fiber-optic Fabry-Perot pressure sensor, based on micro-electromechanical system (MEMS) is developed. A series of experiments are designed and carried out to validate the sensor's applicability for high temperature and pressure environments. Preliminary results are gathered using an existing silicon membrane in order to verify the concept, which was fabricated using anisotropic etching. Silicon on insulator (SOI) multiuser fabrication process is used to produce three designs of silicon membranes through Deep reactive-ion etching (DRIE). These devices are packaged with a stainless steel housing using epoxy to support the die and verify alignment between the fiber and reflective membrane. Once assembled, the Fabry-Perot cavity is formed between the membrane and fiber surface. Experimental results are collected using the proof of concept device for temperature ranges of 20 - 100 ʻC and gauge pressures from 0 - 1000 PSI, and for the SOI devices at room temperature and gauge pressures from 0 to 3000 PSI. Analysis of this data shows operating pressure ranges of 150 to 2300 PSI, maximum nonlinearity of less than 2.6% and sensitivities between 0.36 and 1.4 nm/PSI. The experimental deflection results are compared against finite element and analytical models to verify the expected response. This is adjusted for temperature effects using predictions of material property temperature-dependence and thermal expansion. In order to examine the impact of fabrication methodology, a fixed-fixed support analytical model is compared to experimental data of the four membrane designs. It is found that the anisotropic etched membrane shows poor agreement with this analytical model, showing 570% greater sensitivity than predicted using the model. Finite element modeling of the system shows significant deformation in the membrane support structure, resulting in this greater sensitivity. A simply supported analytical model is also compared to the data, showing 100% greater sensitivity. This model is adjusted using a least squares procedure to fit the experimental data through modification of the support-defined leading coefficient. A high temperature trial shows reduced sensitivity to pressure, corroborating the predicted finite element behavior. Silicon on insulator DRIE membranes show similar error, on the order of 100%, when compared to the fixed-fixed analytical model. This model is adjusted in a similar manner to fit the experimental data. The findings of this thesis suggest that unaccounted-for deflection is present in the membrane supports of DRIE and anisotropic etched MEMS devices, which significantly impacts sensor response to pressure. This results in higher sensitivity than analytically predicted occurring in the experimental trials of the as-fabricated devices. Future work should be focused on expanding the predictive power of MEMS membranes, stabilization of the optical signal and integration of temperature sensing to expand the capabilities of the device while correcting for real-time thermal aberration.

Applied mechanics reviews

Applied mechanics reviews
Author:
Publisher:
Total Pages: 400
Release: 1948
Genre: Mechanics, Applied
ISBN:

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Energy Research Abstracts

Energy Research Abstracts
Author:
Publisher:
Total Pages: 520
Release: 1979
Genre: Power resources
ISBN:

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Nuclear Science Abstracts

Nuclear Science Abstracts
Author:
Publisher:
Total Pages: 1146
Release: 1975
Genre: Nuclear energy
ISBN:

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Development of Dynamic Pressure Sensor for High Temperature Applications

Development of Dynamic Pressure Sensor for High Temperature Applications
Author: Alfin Leo
Publisher:
Total Pages: 0
Release: 2010
Genre:
ISBN:

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Pressure measurement under high temperature environments is required in many engineering applications and it poses many practical problems. Pressure patterns are highly desirable for health monitoring for improved performance and accurate prediction of remaining life of systems used in various applications. Data acquisition in harsh environments has always been a major challenge to the available technology. Sensing becomes more intricate in case if it has to operate under extreme conditions of temperature. Propulsion system applications represent one such area that requires a sensor that is absolutely accurate and has utmost sensitivity coupled with the ability to withstand high temperature. The need for such sensors is driven by the dependence of the performance of propulsion system on pressure pattern encountered along the gas path. Associated with that, high resolution, small size, low time dependent drift and stable range of measurement will complete the performance of such Microsystems Sensors using the current technology are capable of reliable measurement for a limited time at an extremely high cost and are bulky thereby preventing online monitoring. Improvement in the durability of the sensors requires new technology and will definitely open new areas of research. A number of technologies have been lately investigated, these technologies targeting specific applications and they are limited by the maximum operating temperature. The objective of this research is to develop a dynamic pressure measurement system that would be capable of operating at high temperatures with the technology of the device based on Silicon Carbon Nitride (SiCN). The principle of operation is based on the drag effect. Silicon carbon-nitride (SiCN) is a material that has been little explored. The service temperature of SiCN is in the range of 1400°C. The structure is produced from a liquid polymer precursor that could be originally formed into any shape. The proposed micro sensor can measure dynamic pressure and detects flow which is very important to know as the flow continuity is critical in many applications. Furthermore pressure measurement can be used as a base for many aspects. For example the proposed micro sensor could be designed and packaged to be fitted in the gas turbine engine. The correlation of the acquired data from the sensors may provide valuable timely information on imminent instability in the gas flow, detect leakage, improve efficiency etc.