Device And Process Technologies For Mems And Microelectronics Ii
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Author | : Jung-Chih Chiao |
Publisher | : SPIE-International Society for Optical Engineering |
Total Pages | : 612 |
Release | : 2004 |
Genre | : Art |
ISBN | : 9780819451699 |
Download Device and Process Technologies for MEMS, Microelectronics, and Photonics III Book in PDF, Epub and Kindle
Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.
Author | : P. Rai-Choudhury |
Publisher | : SPIE Press |
Total Pages | : 544 |
Release | : 2000 |
Genre | : Technology & Engineering |
ISBN | : 9780819437167 |
Download MEMS and MOEMS Technology and Applications Book in PDF, Epub and Kindle
The silicon age that led the computer revolution has significantly changed the world. The next 30 years will see the incorporation of new types of functionality onto the chip-structures that will enable the chip to reason, to sense, to act and to communicate. Micromachining technologies offer a wide range of possibilities for active and passive devices. Recent developments have produced sensors, actuators and optical systems. Many of these technologies are based on surface micromachining, which has evolved from silicon integrated circuit technology. This book is written by experts in the field. It contains useful details in design and processing and can be utilized as a reference book or as a textbook.
Author | : Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems |
Publisher | : National Academies Press |
Total Pages | : 76 |
Release | : 1997-12-15 |
Genre | : Technology & Engineering |
ISBN | : 0309591511 |
Download Microelectromechanical Systems Book in PDF, Epub and Kindle
Microelectromenchanical systems (MEMS) is a revolutionary field that adapts for new uses a technology already optimized to accomplish a specific set of objectives. The silicon-based integrated circuits process is so highly refined it can produce millions of electrical elements on a single chip and define their critical dimensions to tolerances of 100-billionths of a meter. The MEMS revolution harnesses the integrated circuitry know-how to build working microsystems from micromechanical and microelectronic elements. MEMS is a multidisciplinary field involving challenges and opportunites for electrical, mechanical, chemical, and biomedical engineering as well as physics, biology, and chemistry. As MEMS begin to permeate more and more industrial procedures, society as a whole will be strongly affected because MEMS provide a new design technology that could rival--perhaps surpass--the societal impact of integrated circuits.
Author | : Cornelius T. Leondes |
Publisher | : Springer Science & Business Media |
Total Pages | : 2142 |
Release | : 2007-10-08 |
Genre | : Technology & Engineering |
ISBN | : 0387257861 |
Download Mems/Nems Book in PDF, Epub and Kindle
This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.
Author | : Jung-Chih Chiao |
Publisher | : Society of Photo Optical |
Total Pages | : 538 |
Release | : 2001-01-01 |
Genre | : Technology & Engineering |
ISBN | : 9780819443229 |
Download Device and Process Technologies for MEMS and Microelectronics II Book in PDF, Epub and Kindle
Author | : Reza Ghodssi |
Publisher | : Springer Science & Business Media |
Total Pages | : 1211 |
Release | : 2011-03-18 |
Genre | : Technology & Engineering |
ISBN | : 0387473181 |
Download MEMS Materials and Processes Handbook Book in PDF, Epub and Kindle
MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.
Author | : Henry Baltes |
Publisher | : John Wiley & Sons |
Total Pages | : 610 |
Release | : 2013-03-26 |
Genre | : Technology & Engineering |
ISBN | : 352767506X |
Download CMOS - MEMS Book in PDF, Epub and Kindle
This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. Here, the combination of the globally established, billion dollar chip mass fabrication technology CMOS with the fascinating and commercially promising new world of MEMS is covered from all angles. The book introduces readers to this fi eld and takes them from fabrication technologies and material charaterization aspects to the actual applications of CMOS-MEMS - a wide range of miniaturized physical, chemical and biological sensors and RF systems. Vital knowledge on circuit and system integration issues concludes this in-depth treatise, illustrating the advantages of combining CMOS and MEMS in the first place, rather than having a hybrid solution.
Author | : Nadim Maluf |
Publisher | : Artech House Publishers |
Total Pages | : 306 |
Release | : 2000 |
Genre | : Technology & Engineering |
ISBN | : |
Download An Introduction to Microelectromechanical Systems Engineering Book in PDF, Epub and Kindle
A non-technical introduction to the field of microelectromechanical systems (MEMS). It describes in detail the materials used in producing MEMS - including silicon, polymers and glass and quartz substrates - as well as MEMS design for nozzles, sensors, valves and other applications. It examines the manufacture of commercial MEMS using technologies such as oxidation, lithography, chemical vapour deposition and silicon fusion bonding and applications in a wide range of industries including data storage, telecommunications, consumer, automotive, medical and defence. The book also addresses the future of MEMS - its potential for microelectrode arrays, actuators and optical switches and other technologies.
Author | : Kevin Chau |
Publisher | : Society of Photo Optical |
Total Pages | : 394 |
Release | : 1999 |
Genre | : Technology & Engineering |
ISBN | : 9780819434937 |
Download Device and Process Technologies for MEMS and Microelectronics Book in PDF, Epub and Kindle
This selection of papers on microelectromechanical systems (MEMS) and microelectronics explores the device and process technologies used in these disciplines.
Author | : Jung-Chih Chiao |
Publisher | : SPIE-International Society for Optical Engineering |
Total Pages | : 0 |
Release | : 2004 |
Genre | : Art |
ISBN | : 9780819451699 |
Download Device and Process Technologies for MEMS, Microelectronics, and Photonics III Book in PDF, Epub and Kindle
Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.