Design, Fabrication, and Characterization of High Density Silicon Photonic Components

Design, Fabrication, and Characterization of High Density Silicon Photonic Components
Author: Adam Jones
Publisher:
Total Pages: 124
Release: 2014
Genre:
ISBN:

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Our burgeoning appetite for data relentlessly demands exponential scaling of computing and communications resources leading to an overbearing and ever-present drive to improve efficiency while reducing on-chip area even as photonic components expand to fill application spaces no longer satisfied by their electronic counterparts. With a high index contrast, low optical loss, and compatibility with the CMOS fabrication infrastructure, silicon-on-insulator technology delivers a mechanism by which efficient, sub-micron waveguides can be fabricated while enabling monolithic integration of photonic components and their associated electronic infrastructure. The result is a solution leveraging the superior bandwidth of optical signaling on a platform capable of delivering the optical analogue to Moore's Law scaling of transistor density. Device size is expected to end Moore's Law scaling in photonics as Maxwell's equations limit the extent to which this parameter may be reduced. The focus of the work presented here surrounds photonic device miniaturization and the development of 3D optical interconnects as approaches to optimize performance in densely integrated optical interconnects. In this dissertation, several technological barriers inhibiting widespread adoption of photonics in data communications and telecommunications are explored. First, examination of loss and crosstalk performance in silicon nitride over SOI waveguide crossings yields insight into the feasibility of 3D optical interconnects with the first experimental analysis of such a structure presented herein. A novel measurement platform utilizing a modified racetrack resonator is then presented enabling extraction of insertion loss data for highly efficient structures while requiring minimal on-chip area. Finally, pioneering work in understanding the statistical nature of doublet formation in microphotonic resonators is delivered with the resulting impact on resonant device design detailed.

Fabrication and Characterization of Low-dimensional Structures for Optoelectronic Device Applications

Fabrication and Characterization of Low-dimensional Structures for Optoelectronic Device Applications
Author: Latha Nataraj
Publisher:
Total Pages:
Release: 2011
Genre: Germanium
ISBN: 9781124479811

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Low-dimensional structures can be defined as structures and components with novel and improved physical, chemical, and biological properties that result in new phenomena and processes due to their nanoscale size. This work, discusses the fabrication and characterization of low-dimensional structures such as Germanium-rich islands on Silicon, Germanium nanocrystals, Silicon nanomembranes, and quantum dot and quantum well structures made from III-V compounds, that have applications in on-chip and inter-chip optical interconnects, novel photovoltaic devices, and other optoelectronic devices. Silicon-Germanium quantum dots have been receiving considerable attention lately as a means to achieve high-performance hybrid photonics circuitry within CMOS platforms. Strain in Silicon-Germanium heterostructures has shown increased carrier mobility that leads to better performance. Moderate tensile strains in combination with heavy n-type doping have proven to favor direct band-to-band radiative recombination in Germanium, at optical telecommunication wavelengths. Self-assembled doped Germanium islands on Silicon have shown improved light-emission properties at telecommunication wavelengths with higher activation energies and improved ratio of radiative to non-radiative recombination. It is well known that the Stranski-Krastinov growth mode of these islands by molecular-beam-epitaxy is based on the strain due to the 4.2% lattice mismatch between the Germanium and Silicon atoms. Therefore it is extremely important to understand the strain in these structures and their influence on the optical properties of the islands, using various characterization techniques such as Raman spectroscopy, absorption measurements, photoluminescence spectroscopy, temperature-dependent, excitation-intensity-dependent, and time-resolved photoluminescence and spectroscopy. Band-engineered Germanium nanocrystals are considered to be highly promising for Silicon photonics integration due the near-direct band structure of the material. Germanium is fully-compatible with CMOS and the nanocrystals provide stronger confinement than Silicon nanocrystals due to the higher dielectric constant and larger Bohr-radius. In addition, large Germanium nanocrystals provide efficient emission, at room temperature, in the spectral range suitable for optical telecommunications. Fabrication of free-standing Germanium nanocrystals has been successful using a simple and inexpensive process. Their excellent light-emission properties, simple fabrication, and compatibility with standard microelectronic processes make them highly attractive for Silicon photonics integration and it is essential to understand their structural and optical properties. Raman spectroscopy, high-resolution-transmission-electron-microscopy, excitation-intensity-dependent photoluminescence spectroscopy, and time-resolved photoluminescence spectroscopy are used to gain insight into the structural properties, strain, photo-emission and recombination mechanisms in these structures. Thin, flexible semiconductor nanoscale membranes are superior platforms for high-performance flexible optoelectronic devices and high-efficiency flexible solar cell designs. Existing processes are extremely complicated and expensive. We develop a simple and inexpensive process for the fabrication of Silicon thin films for application in flexible solar cells. The structural properties are studied with techniques such as surface-enhanced Raman spectroscopy. Further characterization of optical properties and strain are being contemplated using x-ray diffraction, photoluminescence spectroscopy, and Raman spectroscopy techniques. In addition, this work will discuss the optical characterization of various III-V materials systems such as Gallium-Arsenide/Gallium-Arsenide-Antimonide and Indium-Gallium-Arsenide/Gallium-Arsenide to study effects of surface passivation using Antimony and delta doping in these structures. These structures are of great interest for lasers and photodetectors in the long wavelength range and novel photovoltaic devices such as intermediate band solar cells. Room temperature photoluminescence spectroscopy and variations such as excitation-intensity dependent and temperature-dependent spectroscopy techniques have been used to determine emission properties and sub-band level occupancies and other structural characteristics such as defect densities and crystal quality.

Photonic Waveguide Components on Silicon Substrate

Photonic Waveguide Components on Silicon Substrate
Author: Swagata Samanta
Publisher: Springer Nature
Total Pages: 112
Release: 2019-11-16
Genre: Technology & Engineering
ISBN: 9811513112

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This book focuses on the design and development of SU-8 polymer and silicon waveguide-based devices using the effective index based matrix method. Various fabrication techniques like laser direct writing (LDW), Focused Ion Beam (FIB) and optical lithography are discussed. FIB lithography has been explored for photonic-crystal structures on the waveguide and for directional coupler in coupled region. This technique is shown to be suitable in fabricating photonic crystal structures as well as for making any precise modifications in micro- and nano-meter photonic waveguide structures. This book can be a useful reference for students, researchers, and fabrication engineers working in the areas of integrated optics, optical communications, laser technology and optical lithography for device manufacturing.

Silicon - Polymer Hybrid Integrated Microwave Photonic Devices for Optical Interconnects and Electromagnetic Wave Detection

Silicon - Polymer Hybrid Integrated Microwave Photonic Devices for Optical Interconnects and Electromagnetic Wave Detection
Author: Xingyu Zhang
Publisher:
Total Pages: 532
Release: 2015
Genre:
ISBN:

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The accelerating increase in information traffic demands the expansion of optical access network systems that require high-performance optical and photonic components. In short-range communication links, optical interconnects have been widely accepted as a viable approach to solve the problems that copper based electrical interconnects have encountered in keeping up with the surge in the data rate demand over the last decades. Low cost, ease of fabrication, and integration capabilities of low optical-loss polymers make them attractive for integrated photonic applications to support futuristic data communication networks. In addition to passive wave-guiding components, electro-optic (EO) polymers consisting of a polymeric matrix doped with organic nonlinear chromophores have enabled wide-RF-bandwidth and low-power active photonic devices. Beside board level passive and active optical components, on-chip micro- or nano-photonic devices have been made possible by the hybrid integration of EO polymers onto the silicon platform. In recent years, silicon photonics have attracted a significant amount of attentions, because it offers compact device size and the potential of complementary metal-oxide-semiconductor (CMOS) compatible photonic integrated circuits. The combination of silicon photonics and EO polymers can enable miniaturized and high-performance hybrid integrated photonic devices, such as electro-optic modulators, optical interconnects, and microwave photonic sensors. Silicon photonic crystal waveguides (PCWs) exhibit slow-light effects which are beneficial for device miniaturization. Especially, EO polymer filled silicon slotted PCWs further reduce the device size and enhance the device performance by combining the best of these two systems. The potential applications of these silicon-polymer hybrid integrated devices include not only optical interconnects, but also optical sensing and microwave photonics. In this dissertation, the design, fabrication, and characterization of several types of silicon-polymer hybrid photonic devices will be presented, including EO polymer filled silicon PCW modulators for on-chip optical interconnects, antenna-coupled optical modulators for electromagnetic wave detections, and low-loss strip-to-slot PCW mode converters. In addition, some polymer-based devices and silicon-based photonic devices will also be presented, such as traveling wave electro-optic polymer modulators based on domain-inversion directional couplers, and silicon thermo-optic switches based on coupled photonic crystal microcavities. Furthermore, some microwave (or RF) components such as integrated broadband bowtie antennas for microwave photonic applications will be covered. Some on-going work or suggested future work will also be introduced, including in-device pyroelectric poling for EO polymer filled silicon slot PCWs, millimeter- or Terahertz-wave sensors based on EO polymer filled plasmonic slot waveguide, low-loss silicon-polymer hybrid slot photonic crystal waveguides fabricated by CMOS foundry, logic devices based on EO polymer microring resonators, and so on.

Silicon Photonics Design

Silicon Photonics Design
Author: Lukas Chrostowski
Publisher: Cambridge University Press
Total Pages: 439
Release: 2015-03-12
Genre: Technology & Engineering
ISBN: 1316240894

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From design and simulation through to testing and fabrication, this hands-on introduction to silicon photonics engineering equips students with everything they need to begin creating foundry-ready designs. In-depth discussion of real-world issues and fabrication challenges ensures that students are fully equipped for careers in industry. Step-by-step tutorials, straightforward examples, and illustrative source code fragments guide students through every aspect of the design process, providing a practical framework for developing and refining key skills. Offering industry-ready expertise, the text supports existing PDKs for CMOS UV-lithography foundry services (OpSIS, ePIXfab, imec, LETI, IME and CMC) and the development of new kits for proprietary processes and clean-room based research. Accompanied by additional online resources to support students, this is the perfect learning package for senior undergraduate and graduate students studying silicon photonics design, and academic and industrial researchers involved in the development and manufacture of new silicon photonics systems.