Atomic Layer Deposition For Energy And Ssemiconductor Applications
Download Atomic Layer Deposition For Energy And Ssemiconductor Applications full books in PDF, epub, and Kindle. Read online free Atomic Layer Deposition For Energy And Ssemiconductor Applications ebook anywhere anytime directly on your device. Fast Download speed and no annoying ads. We cannot guarantee that every ebooks is available!
Author | : Yongmin Kim |
Publisher | : |
Total Pages | : |
Release | : 2018 |
Genre | : |
ISBN | : |
Download Atomic Layer Deposition for Energy and Ssemiconductor Applications Book in PDF, Epub and Kindle
In this thesis, I contribute to two instrumental sectors in our current society -- semiconductor and energy -- by developing novel materials through advanced nanoscale engineering through atomic layer deposition (ALD). ALD is a deposition technique in vacuum, which can make highly uniform films with a thickness range of 1-100 nm on both 2-D and 3-D structured substrates. ALD chemistries enable the deposition of a wide diversity of materials. Furthermore, performing diverse ALD chemistries in single deposition is possible, leading to fabrication of both homogenous mixtures and heterogeneous structures (e.g. nanolaminate and metal/metal-oxide composite). First, I will discuss about the use of ALD to fabricate barium titanates and silicon nitrides for the applications in key semiconductor components in Chapters 2 and 3. The continuous downscaling of integrated circuits (ICs) necessitates the development of ultrathin oxides and nitrides, mainly used for dielectric materials and sidewall spacers in transistors, respectively. Oxide films with high dielectric constants (i.e. high-k) and low electrical leakage currents are essential for the applications of information storage devices such as dynamic random-access memory (DRAM). Using ALD, ultrathin (
Author | : Cheol Seong Hwang |
Publisher | : Springer Science & Business Media |
Total Pages | : 266 |
Release | : 2013-10-18 |
Genre | : Science |
ISBN | : 146148054X |
Download Atomic Layer Deposition for Semiconductors Book in PDF, Epub and Kindle
Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.
Author | : Julien Bachmann |
Publisher | : John Wiley & Sons |
Total Pages | : 308 |
Release | : 2017-05-30 |
Genre | : Technology & Engineering |
ISBN | : 3527339124 |
Download Atomic Layer Deposition in Energy Conversion Applications Book in PDF, Epub and Kindle
Combining the two topics for the first time, this book begins with an introduction to the recent challenges in energy conversion devices from a materials preparation perspective and how they can be overcome by using atomic layer deposition (ALD). By bridging these subjects it helps ALD specialists to understand the requirements within the energy conversion field, and researchers in energy conversion to become acquainted with the opportunities offered by ALD. With its main focus on applications of ALD for photovoltaics, electrochemical energy storage, and photo- and electrochemical devices, this is important reading for materials scientists, surface chemists, electrochemists, electrotechnicians, physicists, and those working in the semiconductor industry.
Author | : Nicola Pinna |
Publisher | : John Wiley & Sons |
Total Pages | : 463 |
Release | : 2012-09-19 |
Genre | : Technology & Engineering |
ISBN | : 3527639926 |
Download Atomic Layer Deposition of Nanostructured Materials Book in PDF, Epub and Kindle
Atomic layer deposition, formerly called atomic layer epitaxy, was developed in the 1970s to meet the needs of producing high-quality, large-area fl at displays with perfect structure and process controllability. Nowadays, creating nanomaterials and producing nanostructures with structural perfection is an important goal for many applications in nanotechnology. As ALD is one of the important techniques which offers good control over the surface structures created, it is more and more in the focus of scientists. The book is structured in such a way to fi t both the need of the expert reader (due to the systematic presentation of the results at the forefront of the technique and their applications) and the ones of students and newcomers to the fi eld (through the first part detailing the basic aspects of the technique). This book is a must-have for all Materials Scientists, Surface Chemists, Physicists, and Scientists in the Semiconductor Industry.
Author | : Tommi Kääriäinen |
Publisher | : John Wiley & Sons |
Total Pages | : 274 |
Release | : 2013-05-28 |
Genre | : Technology & Engineering |
ISBN | : 1118062779 |
Download Atomic Layer Deposition Book in PDF, Epub and Kindle
Since the first edition was published in 2008, Atomic Layer Deposition (ALD) has emerged as a powerful, and sometimes preferred, deposition technology. The new edition of this groundbreaking monograph is the first text to review the subject of ALD comprehensively from a practical perspective. It covers ALD's application to microelectronics (MEMS) and nanotechnology; many important new and emerging applications; thermal processes for ALD growth of nanometer thick films of semiconductors, oxides, metals and nitrides; and the formation of organic and hybrid materials.
Author | : Julien Bachmann |
Publisher | : John Wiley & Sons |
Total Pages | : 366 |
Release | : 2017-03-15 |
Genre | : Technology & Engineering |
ISBN | : 3527694838 |
Download Atomic Layer Deposition in Energy Conversion Applications Book in PDF, Epub and Kindle
Combining the two topics for the first time, this book begins with an introduction to the recent challenges in energy conversion devices from a materials preparation perspective and how they can be overcome by using atomic layer deposition (ALD). By bridging these subjects it helps ALD specialists to understand the requirements within the energy conversion field, and researchers in energy conversion to become acquainted with the opportunities offered by ALD. With its main focus on applications of ALD for photovoltaics, electrochemical energy storage, and photo- and electrochemical devices, this is important reading for materials scientists, surface chemists, electrochemists, electrotechnicians, physicists, and those working in the semiconductor industry.
Author | : J. W. Elam |
Publisher | : The Electrochemical Society |
Total Pages | : 469 |
Release | : 2010-10 |
Genre | : Science |
ISBN | : 1566778212 |
Download Atomic Layer Deposition Applications 6 Book in PDF, Epub and Kindle
The continuously expanding realm of Atomic Layer Deposition (ALD) Applications is the focus of this reoccurring symposium. ALD can enable the precise deposition of ultra-thin, highly conformal coatings over complex 3D topographies with controlled thickness and composition. This issue of ECS Transactions contains peer reviewed papers presented at the symposium. A broad spectrum of ALD applications is featured, including novel nano-composites and nanostructures, dielectrics for state-of-the-art transistors and capacitors, optoelectronics, and a variety of other emerging applications.
Author | : Ana Londergan |
Publisher | : The Electrochemical Society |
Total Pages | : 300 |
Release | : 2007 |
Genre | : Atomic layer deposition |
ISBN | : 1566775736 |
Download Atomic Layer Deposition Applications 3 Book in PDF, Epub and Kindle
The continuously expanding realm of Atomic Layer Deposition (ALD) Applications is the symposium focus. ALD can enable the precise deposition of ultra-thin, highly conformal coatings over complex 3D topography, with controlled composition and properties. Following two successful years, this symposium is well on its way to becoming a forum for the sharing of cutting edge research in the various areas where ALD is used.
Author | : Ana Londergan |
Publisher | : The Electrochemical Society |
Total Pages | : 300 |
Release | : 2007 |
Genre | : Atomic layer deposition |
ISBN | : 1566775426 |
Download Atomic Layer Deposition Applications 2 Book in PDF, Epub and Kindle
This issue gives an overview of the cutting edge research in the various areas where Atomic Layer Deposition (ALD) can be used, enabling the identification of issues, challenges, and areas where further research is needed. Contributions include: Memory applications, Interconnects and contacts, ALD Productivity enhancement and precursor development, ALD for optical and photonic applications, and Applications in other areas, such as MEMs, nanotechnology, fabrication of sensors and catalysts, etc.
Author | : F. Roozeboom |
Publisher | : The Electrochemical Society |
Total Pages | : 83 |
Release | : 2018-09-21 |
Genre | : Science |
ISBN | : 1607688522 |
Download Atomic Layer Deposition Applications 14 Book in PDF, Epub and Kindle