A combined finite element method/method of moments (FEM/MoM) approach is used to analyze the electromagnetic scattering properties of a three-dimensional-cavity-backed aperture in an infinite ground plane. The FEM is used to formulate the fields inside the cavity, and the MoM (with subdomain bases) in both spectral and spatial domains is used to formulate the fields above the ground plane. Fields in the aperture and the cavity are solved using a system of equations resulting from the combination of the FEM and the MoM. By virtue of the FEM, this combined approach is applicable to all arbitrarily shaped cavities with inhomogeneous material fillings, and because of the subdomain bases used in the MoM, the apertures can be of any arbitrary shape. This approach leads to a partly sparse and partly full symmetric matrix, which is efficiently solved using a biconjugate gradient algorithm. Numerical results are presented to validate the analysis. Reddy, C. J. and Deshpande, Manohar D. and Cockrell, C. R. and Beck, F. B. Langley Research Center RTOP 505-64-70-01...