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| Release | : 2015 |
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| ISBN | : 9781467368353 |
| Author | : IEEE Staff |
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| Release | : 2015-08-02 |
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| ISBN | : 9781467368360 |
Optical MEMS and nanophotonics describes actuators and structures interacting with light for manipulation in applications and fields such as sensing, telecom, imaging, and bio engineering, creating microlenses, diffractive elements, displays, micromirrors, subwavelength optics, and more
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| Release | : 2015 |
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| ISBN | : 9781467368346 |
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| Release | : 2015 |
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| Release | : 2017 |
| Genre | : Microelectromechanical systems |
| ISBN | : 9781538607374 |
| Author | : IEEE Staff |
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| Release | : 2017-08-13 |
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| ISBN | : 9781538607381 |
All areas of optical MEMS, including terahertz, and nanophotonic technologies, particularly with mechanical or phonon interactions, including device physics, device design, fabrication, characterization and applications
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| Release | : 2018 |
| Genre | : Microelectromechanical systems |
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| Total Pages | : 231 |
| Release | : 2014 |
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| ISBN | : 9780992841423 |
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| Release | : 2019 |
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| ISBN | : 9781728145037 |
| Author | : IEEE Staff |
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| Total Pages | : 174 |
| Release | : 2013-08-18 |
| Genre | : Microelectromechanical systems |
| ISBN | : 9781479911554 |
