The Structural and Optical Properties of Hydrogenated Amorphous Carbon (a-C:H) Thin Films Deposited Using a Direct Current-plasma Enhanced Chemical Vapour Deposition (DC-PECVD) Technique

The Structural and Optical Properties of Hydrogenated Amorphous Carbon (a-C:H) Thin Films Deposited Using a Direct Current-plasma Enhanced Chemical Vapour Deposition (DC-PECVD) Technique
Author: Suriani Abu Bakar
Publisher:
Total Pages:
Release: 2005
Genre: Thin films
ISBN:

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Properties and Characterization of Amorphous Carbon Films

Properties and Characterization of Amorphous Carbon Films
Author: J.J. Pouch
Publisher: Trans Tech Publications Ltd
Total Pages: 714
Release: 1991-01-01
Genre: Technology & Engineering
ISBN: 3035704503

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Amorphous, hydrogenated carbon (AHC) films can be deposited on various substrates using several techniques, e.g. plasma deposition and ion beam deposition. The resulting films can be hard, wear resistant and transparent.