Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics 9

Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics 9
Author: Ram Ekwal Sah
Publisher: The Electrochemical Society
Total Pages: 863
Release: 2007
Genre: Dielectric films
ISBN: 1566775523

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This issue of ECS Transactions contains the papers presented in the symposium on Silicon Nitride, Silicon Dioxide Thin Insulating Films, and Emerging Dielectics held May 6-11, 2007 in Chicago. Papers were presented on deposition, characterization and applications of the dielectrics including high- and low-k dielectrics, as well as interface states, device characterization, reliabiliy and modeling.

Silicon Nitride and Silicon Dioxide Thin Insulating Films

Silicon Nitride and Silicon Dioxide Thin Insulating Films
Author: Electrochemical Society. Dielectric Science and Technology Division
Publisher: The Electrochemical Society
Total Pages: 304
Release: 2001
Genre: Science
ISBN: 9781566773133

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Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics 10

Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics 10
Author: R. Ekwal Sah
Publisher: The Electrochemical Society
Total Pages: 871
Release: 2009
Genre: Dielectric films
ISBN: 1566777100

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The issue of ECS Transactions contains papers presented at the Tenth International Symposium on Silicon Nitride, Silicon Dioxide, and Alternate Emerging Dielectrics held in San Francisco on May 24-29, 2009. The papers address a very wide range of fabrication and characterization techniques, and applications of thin dielectric films in microelectronic and optoelectronic devices. More specific topics addressed by the papers include reliability, interface states, gate oxides, passivation, and dielctric breakdown.