Multi Level Interconnects For Heterojunction Bipolar Transistor Integrated Circuit Technologies
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Release | : 2001 |
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Download Multi-level Interconnects for Heterojunction Bipolar Transistor Integrated Circuit Technologies Book in PDF, Epub and Kindle
Heterojunction bipolar transistors (HBTs) are mesa structures which present difficult planarization problems in integrated circuit fabrication. The authors report a multilevel metal interconnect technology using Benzocyclobutene (BCB) to implement high-speed, low-power photoreceivers based on InGaAs/InP HBTs. Processes for patterning and dry etching BCB to achieve smooth via holes with sloped sidewalls are presented. Excellent planarization of 1.9[micro]m mesa topographies on InGaAs/InP device structures is demonstrated using scanning electron microscopy (SEM). Additionally, SEM cross sections of both the multi-level metal interconnect via holes and the base emitter via holes required in the HBT IC process are presented. All via holes exhibit sloped sidewalls with slopes of 0.4[micro]m/[micro]m to 2[micro]m/[micro]m which are needed to realize a robust interconnect process. Specific contact resistances of the interconnects are found to be less than 6[times] 10[sup[minus]8][Omega]cm[sup 2]. Integrated circuits utilizing InGaAs/InP HBTs are fabricated to demonstrate the applicability and compatibility of the multi-level interconnect technology with integrated circuit processing.
Author | : Mark J. W. Rodwell |
Publisher | : World Scientific |
Total Pages | : 374 |
Release | : 2001 |
Genre | : Technology & Engineering |
ISBN | : 9789812810014 |
Download High-speed Integrated Circuit Technology Book in PDF, Epub and Kindle
This book reviews the state of the art of very high speed digital integrated circuits. Commercial applications are in fiber optic transmission systems operating at 10, 40, and 100 Gb/s, while the military application is ADCs and DACs for microwave radar. The book contains detailed descriptions of the design, fabrication, and performance of wideband Si/SiGe-, GaAs-, and InP-based bipolar transistors. The analysis, design, and performance of high speed CMOS, silicon bipolar, and III-V digital ICs are presented in detail, with emphasis on application in optical fiber transmission and mixed signal ICs. The underlying physics and circuit design of rapid single flux quantum (RSFQ) superconducting logic circuits are reviewed, and there is extensive coverage of recent integrated circuit results in this technology. Contents: Preface (M J W Rodwell); High-Speed and High-Data-Bandwidth Transmitter and Receiver for Multi-Channel Serial Data Communication with CMOS Technology (M Fukaishi et al.); High-Performance Si and SiGe Bipolar Technologies and Circuits (M Wurzer et al.); Self-Aligned Si BJT/SiGe HBT Technology and Its Application to High-Speed Circuits (K Washio); Small-Scale InGaP/GaAs Heterojunction Bipolar Transistors for High-Speed and Low-Power Integrated-Circuit Applications (T Oka et al.); Prospects of InP-Based IC Technologies for 100-Gbit/S-Class Lightwave Communications Systems (T Enoki et al.); Scaling of InGaAs/InAlAs HBTs for High Speed Mixed-Signal and mm-Wave ICs (M J W Rodwell); Progress Toward 100 GHz Logic in InP HBT IC Technology (C H Fields et al.); Cantilevered Base InP DHBT for High Speed Digital Applications (A L Gutierrez-Aitken et al.); RSFQ Technology: Physics and Devices (P Bunyk et al.); RSFQ Technology: Circuits and Systems (D K Brock). Readership: Researchers, industrialists and academics in electrical and electronic engineering.
Author | : P. C. Chang |
Publisher | : The Electrochemical Society |
Total Pages | : 500 |
Release | : 2005 |
Genre | : Technology & Engineering |
ISBN | : 9781566774628 |
Download State-of-the-Art Program on Compound Semiconductors : (SOTAPOCS XLII) and Processes at the Compound-Semiconductor/Solution Interface Book in PDF, Epub and Kindle
Author | : Tomas Krämer |
Publisher | : |
Total Pages | : 131 |
Release | : 2010 |
Genre | : |
ISBN | : 9783869553931 |
Download High-speed InP Heterojunction Bipolar Transistors and Integrated Circuits in Transferred Substrate Technology Book in PDF, Epub and Kindle
Author | : Gopal K. Rao |
Publisher | : McGraw-Hill Companies |
Total Pages | : 250 |
Release | : 1993 |
Genre | : Computers |
ISBN | : |
Download Multilevel Interconnect Technology Book in PDF, Epub and Kindle
The first book on a key topic in IC technology. Table of Contents: Multilevel Interconnection Design; Multilevel Interconnect Processing; Manufacturing; Reliability; Index. 100 illustrations.
Author | : Jeffrey A. Davis |
Publisher | : Springer Science & Business Media |
Total Pages | : 417 |
Release | : 2012-12-06 |
Genre | : Technology & Engineering |
ISBN | : 1461504619 |
Download Interconnect Technology and Design for Gigascale Integration Book in PDF, Epub and Kindle
This book is jointly authored by leading academic and industry researchers. The material is unique in that it spans IC interconnect topics ranging from IBM's revolutionary copper process to an in-depth exploration into interconnect-aware computer architectures.
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Total Pages | : 2304 |
Release | : 1997 |
Genre | : Electrical engineering |
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Download Electrical & Electronics Abstracts Book in PDF, Epub and Kindle
Author | : |
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Total Pages | : 1500 |
Release | : 1996 |
Genre | : Electronic apparatus and appliances |
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Download Proceedings Book in PDF, Epub and Kindle
Author | : Ethiopia Enideg Nigussie |
Publisher | : Springer Science & Business Media |
Total Pages | : 177 |
Release | : 2011-12-02 |
Genre | : Technology & Engineering |
ISBN | : 1461401313 |
Download Variation Tolerant On-Chip Interconnects Book in PDF, Epub and Kindle
This book presents design techniques, analysis and implementation of high performance and power efficient, variation tolerant on-chip interconnects. Given the design paradigm shift to multi-core, interconnect-centric designs and the increase in sources of variability and their impact in sub-100nm technologies, this book will be an invaluable reference for anyone concerned with the design of next generation, high-performance electronics systems.
Author | : Ertuğrul Sönmez |
Publisher | : Cuvillier Verlag |
Total Pages | : 145 |
Release | : 2008 |
Genre | : |
ISBN | : 3867275025 |
Download 24 GHz Multi-functional MMICs Using SiGe HBTs Book in PDF, Epub and Kindle