Device and Process Technologies for MEMS and Microelectronics

Device and Process Technologies for MEMS and Microelectronics
Author: Kevin Chau
Publisher: Society of Photo Optical
Total Pages: 394
Release: 1999
Genre: Technology & Engineering
ISBN: 9780819434937

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This selection of papers on microelectromechanical systems (MEMS) and microelectronics explores the device and process technologies used in these disciplines.

Device and Process Technologies for MEMS, Microelectronics, and Photonics III

Device and Process Technologies for MEMS, Microelectronics, and Photonics III
Author: Jung-Chih Chiao
Publisher: SPIE-International Society for Optical Engineering
Total Pages: 612
Release: 2004
Genre: Art
ISBN: 9780819451699

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Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.

Device and Process Technologies for MEMS, Microelectronics, and Photonics III

Device and Process Technologies for MEMS, Microelectronics, and Photonics III
Author: Jung-Chih Chiao
Publisher: SPIE-International Society for Optical Engineering
Total Pages: 0
Release: 2004
Genre: Art
ISBN: 9780819451699

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Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.

MEMS and MOEMS Technology and Applications

MEMS and MOEMS Technology and Applications
Author: P. Rai-Choudhury
Publisher: SPIE Press
Total Pages: 544
Release: 2000
Genre: Technology & Engineering
ISBN: 9780819437167

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The silicon age that led the computer revolution has significantly changed the world. The next 30 years will see the incorporation of new types of functionality onto the chip-structures that will enable the chip to reason, to sense, to act and to communicate. Micromachining technologies offer a wide range of possibilities for active and passive devices. Recent developments have produced sensors, actuators and optical systems. Many of these technologies are based on surface micromachining, which has evolved from silicon integrated circuit technology. This book is written by experts in the field. It contains useful details in design and processing and can be utilized as a reference book or as a textbook.

Mems/Nems

Mems/Nems
Author: Cornelius T. Leondes
Publisher: Springer Science & Business Media
Total Pages: 2142
Release: 2007-10-08
Genre: Technology & Engineering
ISBN: 0387257861

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This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.

Microelectromechanical Systems

Microelectromechanical Systems
Author: National Research Council
Publisher: National Academies Press
Total Pages: 76
Release: 1998-01-01
Genre: Technology & Engineering
ISBN: 0309059801

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Microelectromenchanical systems (MEMS) is a revolutionary field that adapts for new uses a technology already optimized to accomplish a specific set of objectives. The silicon-based integrated circuits process is so highly refined it can produce millions of electrical elements on a single chip and define their critical dimensions to tolerances of 100-billionths of a meter. The MEMS revolution harnesses the integrated circuitry know-how to build working microsystems from micromechanical and microelectronic elements. MEMS is a multidisciplinary field involving challenges and opportunites for electrical, mechanical, chemical, and biomedical engineering as well as physics, biology, and chemistry. As MEMS begin to permeate more and more industrial procedures, society as a whole will be strongly affected because MEMS provide a new design technology that could rivalâ€"perhaps surpassâ€"the societal impact of integrated circuits.